Micro-Groove Cutting for Different Materials Using an Elastic Leaf Spring Type Tool Holder

Abstract

Micro-grooves fabrication is increasing due to its importance in different technology fields, as they are required for higher functional applications such as the development of optical lens or micro channels for heat exchangers. A novel method based on the technology developed for Atomic Force Microscopes (AFM) nano-cutting is proposed, where nano-scratches are made using a micro-cantilever with a sharp tip where a normal load sufficient to remove material is applied. Instead of a rigid system to control the relative position between the tool and the workpiece, AFM nano-cutting uses a force feedback control (FBC) of the normal load on the tool edge in order to maintain a constant cutting depth during the manufacture. Due to the limited scale range of AFM machining, a larger mechanism was developed and consists on a XYZ-stage system where an elastic leaf spring type tool holder is mounted with a diamond tool chip. FBC is not yet implemented on this system; however, basic experiments (micro-grooves cutting) were performed on different materials to verify the feasibility of this setup. With these results, it is possible to analyze the relationship between static indentation tests and the normal load required during the micro-grooves fabrication.

B015 Development of a micro/nano-scale constant load cutting mechanism measuring the cutting force by an optical lever

“…This is because any error (thermal deformations, geometrical deviations, etc) on the motion mechanism will be transferred directly to the preciseness of the machined work. For that reason, a solution that can keep constant the cutting depth during the manufacturing process, even on inclined or curved surfaces, and without a complicated NC is required [2].…”