Development of a non-rigid micro-scale cutting mechanism applying a normal cutting force control system

Herrera-Granados, German; Morita, Noboru; Hidai, Hirofumi; Matsusaka, Satoshi; Chibá, Akira; Ashida, Kiwamu; Ogura, I.; Okazaki, Yuji

doi:10.1016/j.precisioneng.2015.09.021

Cited by 16 publications

(6 citation statements)

References 22 publications

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“…However, more complex structures are difficult to be achieved using the simple V-shaped tool. 39,41 In this work, using the cube corner tip as the cutting tool and by a complex tip trace, more complex microstructures can be machined by our setup, which will be explained in the following sections.…”

Section: Resultsmentioning

confidence: 99%

Study of the control process and fabrication of microstructures using a tip-based force control system

Zhang

Yan

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part B:

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The atomic force microscopy tip-based nanomechanical machining method has already been employed to machine different kinds of nanostructures with the control of the normal force of the tip. The previous studies verified the feasibility of the nanomachining approach with the force control. However, there are still some shortcomings of small normal force, small machining scale, high cost and low machining efficiency. Therefore, in this study, a tip-based micromachining system with normal force closed-loop control is established based on the principle of atomic force microscopy. The control parameters are optimized based on an analysis of the control process to enable the production of a constant normal force during machining when using a tip tool. The maximum machining velocity that can be attained using this system while maintaining a constant normal force is obtained based on an analysis of the normal force variations during machining. By controlling nanoscale accuracy and high-precision stage, more complex microstructures, including microsquares, millimeter-scale microchannels and three-dimensional step microchannels, are successfully fabricated using the proposed force control method. Experimental results show that the tip-based normal force control method is a simple, low-cost and versatile micromachining method with the potential ability to machine more complex structures and is likely to find wider applications in the micromachining field.

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Section: Resultsmentioning

confidence: 99%

Study of the control process and fabrication of microstructures using a tip-based force control system

Zhang

Yan

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part B:

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“…Also, these micromachining technologies are unsuitable for nanoscale precision fabrication of structures with nonflat surfaces. However, this problem was previously solved using cutting methods that relied on a force control system that could cut inclined or curved surfaces to the same depth [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Nanoscale Cutting Using Self-Excited Microcantilever

Yang¹,

Ogura²,

Jiang³

et al. 2021

Preprint

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The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes to enable the excitation force applied by an actuator to be transferred efficiently to the tip of the microcantilever for the cutting process. A diamond abrasive that is set on the tip is also fabricated using a focused ion beam technique to improve the cutting effect. The natural frequency of the microcantilever is modulated based on the pressing load. Under conventional external excitation conditions, to maintain the microcantilever in its resonant state, it is necessary to vary the excitation frequency in accordance with the modulation. In this study, rather than using external excitation, the self-excitation cutting method is proposed to overcome this difficulty. The self-excited oscillation is produced by appropriate setting of the phase difference between the deflection signal of the microcantilever and the feedback signal for the actuator. In addition, it is demonstrated experimentally that the change in the phase difference enables us to control the amplitude of the self-excitation. As a result, control of the groove cutting depth is achieved via changes in the phase difference.

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“…Especially, in-process monitoring and feedback of the cutting force is an effective way to realize ductile cutting of brittle material substrates [17][18][19]. Some efforts have thus been made by using an atomic force microscope (AFM)-based system, where the AFM probe tip is employed as a cutting tool controlled in force [20][21][22][23]. Meanwhile, one of the drawbacks of the AFM-based machining is its low cutting force down to µN, which prevents the AFMbased machining from being applied to various machining applications.…”

Section: Introductionmentioning

confidence: 99%

A differential strategy for measurement of a static force in a single-point diamond cutting by a force-controlled fast tool servo

Shimizu¹,

Matsukuma²,

Tohyama³

et al. 2020

Meas. Sci. Technol.

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This paper presents a new strategy for applying a piezoelectric (PZT) force sensor to the measurement of static force in a force sensor-integrated fast tool servo (FS-FTS) system for single-point diamond cutting on planar brittle material substrates. A conventional PZT force sensor unit composed of a PZT force sensor and a charge amplifier cannot be employed for measurement of static force due to the discharging characteristics of PZT materials. In this paper, to realize the long-term stable measurement of static cutting force, the time constant of the PZT force sensor unit is set to be infinitely large by removing the feedback resistor from the charge amplifier. The influence of bias current leakage, which arises as a result of removing the feedback resistor, is compensated through obtaining the differential output of the two PZT force sensor units having identical charge amplifiers and identical thermal characteristics. After microgroove-cutting experiments to verify the stability of the PZT force sensor unit in the conventional FS-FTS unit, a theoretical model for the PZT force sensor unit is established. Some basic experiments are then carried out to verify the feasibility of the proposed differential measurement strategy. Furthermore, a modified FS-FTS unit with a pair of PZT force sensor units based on the proposed strategy is developed, and its effectiveness is demonstrated through experiments.

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Development of a non-rigid micro-scale cutting mechanism applying a normal cutting force control system

Cited by 16 publications

References 22 publications

Study of the control process and fabrication of microstructures using a tip-based force control system

Study of the control process and fabrication of microstructures using a tip-based force control system

Nanoscale Cutting Using Self-Excited Microcantilever

A differential strategy for measurement of a static force in a single-point diamond cutting by a force-controlled fast tool servo

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