2016
DOI: 10.1177/0954405416682276
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Study of the control process and fabrication of microstructures using a tip-based force control system

Abstract: The atomic force microscopy tip-based nanomechanical machining method has already been employed to machine different kinds of nanostructures with the control of the normal force of the tip. The previous studies verified the feasibility of the nanomachining approach with the force control. However, there are still some shortcomings of small normal force, small machining scale, high cost and low machining efficiency. Therefore, in this study, a tip-based micromachining system with normal force closed-loop contro… Show more

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Cited by 7 publications
(8 citation statements)
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“…The schematic diagram of the control system and the properties and parameters of the controller are presented in the previous study. 30…”
Section: Experimental Setup and Detailsmentioning
confidence: 99%
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“…The schematic diagram of the control system and the properties and parameters of the controller are presented in the previous study. 30…”
Section: Experimental Setup and Detailsmentioning
confidence: 99%
“…The schematic diagram of the control system and the properties and parameters of the controller are presented in the previous study. 30 Figure 2 shows the scanning electron microscopy (SEM) images of a regular triangular pyramid (CUBE CORNER/020; Synton-MDP, Nidau, Switzerland) and a single-point diamond tip. The regular triangular pyramid with a face angle of 35.26°and an apex angle of 90°and the single-point diamond tip with a rake angle g o of 0°, a clearance angle a o of 6°and a tool included angle e r of 60°were used in the cutting process.…”
Section: Experimental Setup and Detailsmentioning
confidence: 99%
“…Recently, tip-based micro/nanomachining methods [26][27][28][29][30] have been used to fabricate SERS substrates with two main advantages. First, the wear of the tip is negligible during machining on the metal surface due to the low hardness of the metals used (copper, aluminum).…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the tip-based micro/nanomachining method [26][27][28][29][30] has been used to fabricate SERS substrates. Compared to other methods, the characteristics of this method are mainly two advantages.…”
Section: Introductionmentioning
confidence: 99%