2015
DOI: 10.1016/j.cirp.2015.04.011
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Micro grinding with ultra small micro pencil grinding tools using an integrated machine tool

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Cited by 48 publications
(8 citation statements)
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References 11 publications
(13 reference statements)
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“…Robotized machining centers can be used for finishing, especially of large elements with complex geometry [12]. For the implementation of ceramics grinding processes, among others, specialized multiaxis microgrinding centers [13][14][15] are built and their dynamic characteristics are improved [16]. In the case of machining small ceramic elements, the main technological problem is the automation of the process.…”
Section: Introductionmentioning
confidence: 99%
“…Robotized machining centers can be used for finishing, especially of large elements with complex geometry [12]. For the implementation of ceramics grinding processes, among others, specialized multiaxis microgrinding centers [13][14][15] are built and their dynamic characteristics are improved [16]. In the case of machining small ceramic elements, the main technological problem is the automation of the process.…”
Section: Introductionmentioning
confidence: 99%
“…While machining processes on the microscale are commonly used in ultra-precision engineering [8], nanometersized mechanisms are out of reach for most applications. However, in the fields of photolithography, chemical etching, laser machining, atomic force lithography, or focused ion beam lithography, nanofabrication techniques are already being used [9].…”
Section: Introductionmentioning
confidence: 99%
“…Micro pencil grinding tools (MPGTs) and single edged micro end mills made of cemented carbide and manufactured via precision grinding are available in various geometrical shapes and can be scaled down to 4 µm for micro pencil grinding tools [ 14 ] and 10 µm for micro end mills [ 15 ]. Micro pencil grinding tools consist of a cemented carbide basic body and an abrasive body.…”
Section: Introductionmentioning
confidence: 99%