Micro force sensor fabricated in the LTCC technology

Radosavljevic, Goran; Smetana, Walter; Marić, Andrea; Živanov, Ljiljana; Unger, Michael; Stojanović, Goran

doi:10.1109/miel.2010.5490496

Cited by 17 publications

(12 citation statements)

References 8 publications

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“…However, the sensor is only tested to 450 °C [11–14]. Another team in Novi Sad (Serbia) demonstrated in 2009 a better structure, but worse performance [15,16]. Two LTCC layers are added above the metal electrode to provide perfect protection, but the sensor sensitivity is only 25.6 kHz/bar.…”

Section: Introductionmentioning

confidence: 99%

A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

Tan

Hao

Xiong

et al. 2013

Sensors

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A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance coupling. Experimental systems are designed to obtain the frequency-pressure characteristic, frequency-temperature characteristic and coupling distance. Experimental results show that the sensor can be coupled with an antenna at 600 °C and max distance of 2.8 cm at room temperature. The senor sensitivity is about 860 Hz/bar and hysteresis error and repeatability error are quite low.

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Section: Introductionmentioning

confidence: 99%

A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

Tan

Hao

Xiong

et al. 2013

Sensors

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“…In 2009, a research team in Novi Sad, Serbia, proposed a better structural model. The improved structural design and the use of LTCC material made this embedded structural sensor suitable for high-temperature and chemically aggressive environments [ 16 , 17 ]. In 2013, researchers at the North University of China, which has been committed to developing wireless, high-temperature passive LC ceramic pressure sensors, introduced a unique screen-printing process involving a sacrificial layer of ESL 4900 to prevent deformation of a capacitive embedded cavity during lamination and sintering.…”

Section: Research Status Of Wireless Passive Lc Sensors For Harsh mentioning

confidence: 99%

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

Tan

Jia

et al. 2015

Sensors

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Measurement technology for various key parameters in harsh environments (e.g., high-temperature and biomedical applications) continues to be limited. Wireless passive LC resonant sensors offer long service life and can be suitable for harsh environments because they can transmit signals without battery power or wired connections. Consequently, these devices have become the focus of many current research studies. This paper addresses recent research, key technologies, and practical applications relative to passive LC sensors used to monitor temperature, pressure, humidity, and harmful gases in harsh environments. The advantages and disadvantages of various sensor types are discussed, and prospects and challenges for future development of these sensors are presented.

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“…For the inductor fabrication dielectric tapes, (Heraeus CT 800; W.C. Heraeus, Hanau, Germany) were combined with compatible silver paste for conductive line printing (Heraeus TC 7305A; W.C. Heraeus) and for via filling (Heraeus TC 7304; W.C. Heraeus). A Heraeus material is chosen for realization of inductors structures with cavities, as this material is proven to be a good choice for realization of cavities embedded in the substrate, and it is relatively easy to work with. First, tapes were structured by means of laser micro‐machining to make via holes, alignment holes, and air‐gaps.…”

Section: Fabrication Of Designed Inductorsmentioning

confidence: 99%

Benefits of the LTCC Substrate Configuration with an Air‐Gap for Realization of RF Inductor with High Q‐Factor and SRF

Radosavljevic

Marić

Smetana

et al. 2012

Int J Applied Ceramic Tech

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This article offers a detail description of design, simulation, fabrication and characterization of inductors on different substrate configurations intended for application in radio frequency range. The presented inductors are meander type structures fabricated using low temperature co-fired ceramic technology. Different substrate configurations incorporate placement of an air-gap beneath the inductor. Obtained results present over 30% increase in quality factor and widening of the operating frequency range by over 55% in comparison with inductors on standard substrate configurations.

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Micro force sensor fabricated in the LTCC technology

Cited by 17 publications

References 8 publications

A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

Benefits of the LTCC Substrate Configuration with an Air‐Gap for Realization of RF Inductor with High Q‐Factor and SRF

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