Micro electrochemical machining using electrostatic induction feeding method

Koyano, Tomohiro; Kunieda, Masanori

doi:10.1016/j.cirp.2013.03.107

Cited by 30 publications

(6 citation statements)

References 7 publications

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“…Then the electric potential difference ∆u c between the measuring electrodes is calculated. The calculated results show that ∆u c are sine waves with different amplitudes U 0 and different offsets U e , as illustrated in equation (11).…”

Section: The Influence Of Ecm Environment On Conductivity Sensormentioning

confidence: 87%

“…Due to the micro size of micro ECM processing gap and the complexity of material distribution near processing gap, gap size monitoring methods such as ultrasonic distance detection, eddy current distance detection, etc [8,9] are difficult to detect the gap size due to low resolution and high interference. The gap status detection methods, including voltage detection, current detection, and double layer capacitance detection [10][11][12], all assume that electrolyte properties are constant, which is inconsistent with the actual situation of large fluctuations in electrolyte properties and it is difficult to reflect gap status. According to theoretical and simulation research [13][14][15], electrolyte properties, such as temperature, conductivity, pH, flow rate, are related to the gap status.…”

Section: Introductionmentioning

confidence: 99%

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Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Zhu,

Liu,

et al. 2024

J. Micromech. Microeng.

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The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process. Micro ECM urgently requires gap status monitoring and feedback control. To realize gap status monitoring, a sensors-integrated silicon electrode, with a micro temperature sensor and a micro conductivity sensor on the silicon electrode near-front sidewall, is proposed innovatively in this study. Based on bulk silicon process and electroplating process, sensors-integrated silicon electrodes are designed and fabricated. Based on the signal processing system built for the temperature and conductivity sensor, the temperature and conductivity detection functions are verified and the sensors are calibrated. Micro ECM experiments with sensors-integrated silicon electrodes are carried out and micro holes with 200 μm depth are machined. For the conductivity sensor on the sensors-integrated silicon electrode, due to the affection of electrolytic environment, the function surface is contaminated and damaged, and the structural design needs to be further improved. For the temperature sensor, it is not affected by the electrolytic environment due to insulation-film’s protection, and reliable temperature monitoring is achieved in micro ECM. The detection results indicate that the temperature inside the machining gap has increased by 20 ℃ due to the electrochemical thermal effect and resistance thermal effect in micro ECM, and the temperature shows an increasing trend while machining depth increasing. The feasibility of process monitoring with sensors-integrated silicon electrode in micro ECM is preliminarily verified.

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Section: The Influence Of Ecm Environment On Conductivity Sensormentioning

confidence: 87%

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Zhu,

Liu,

et al. 2024

J. Micromech. Microeng.

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show abstract

“…Schuster et al (2000) propose that the ECM method can be implemented once an ultra-short pulse current with a time of many tens of nanoseconds is utilised. The electrostatic induction feeding ECM was manufactured by Koyano & Kunieda, (2013). Figures 31 and 32 (Koyano & Kunieda, 2013) depict the method's equivalent circuit, voltage waveforms, and gap current.…”

Section: Electrochemical Wire Grindingmentioning

confidence: 99%

“…The electrostatic induction feeding ECM was manufactured by Koyano & Kunieda, (2013). Figures 31 and 32 (Koyano & Kunieda, 2013) depict the method's equivalent circuit, voltage waveforms, and gap current. A pulse voltage is applied across the work gap, and the electrodes' surface develops an electric two-fold layer, which C dl denotes.…”

Section: Electrochemical Wire Grindingmentioning

confidence: 99%

A Review on Recent Achievements and Challenges in Electrochemical Machining of Tungsten Carbide

Asmael,

Memarzadeh

2023

AAES

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Electrochemical machining (ECM) is a modern, unconventional manufacturing technique that uses the electrochemical dissolution of metal to produce pieces with a predetermined shape, dimensions, and surface polish. Tungsten carbide (WC) is used in many fields and applications due to its high wear resistance and hardness. WC is used in cutting tools, mining and drilling equipment, wear parts, industrial machinery, aerospace and defence components, and medical equipment. It gives a workpiece a particular shape and number of boreholes, removes a damaged outer coat, and eliminates surface roughness. Though the ECM of WC is fraught with difficulties and obstacles, altering the electrolytes and refining the technological equipment and process of the ECM of WC can help improve machining accuracy and stability. In the current study, we examined the ECM of WC and compiled a reliable database from reliable sources using the keywords "electrochemical machining" and "tungsten carbide". Research papers constitute the majority of these publications. It was discussed how WC behaves anodically as it applies to ECM, which experiments were conducted with various electrolytes, and how they performed. Several ECM modes have been considered, and each mode has been evaluated in detail for challenges and gaps.

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“…Current research focuses on the study of gap phenomena using transparent electrodes [10] and highspeed camera systems [11,12]. Also process analysis and modelling activities for ECM micro machining [13], electrolyte jet machining [14,15] and Laser-assisted (Jet-) ECM [16,17] are taking place. A recent advanced overview on all ECM simulation approaches is given in [18].…”

Section: Introductionmentioning

confidence: 99%

Interdisciplinary modelling of the electrochemical machining process for engine blades

2015

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Micro electrochemical machining using electrostatic induction feeding method

Cited by 30 publications

References 7 publications

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

A Review on Recent Achievements and Challenges in Electrochemical Machining of Tungsten Carbide

Interdisciplinary modelling of the electrochemical machining process for engine blades

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