2003
DOI: 10.1088/0960-1317/14/1/309
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Micro check valves for integration into polymeric microfluidic devices

Abstract: This paper describes the design, simulation, fabrication and characterization of micro checkvalves suitable for integration into polymeric microfluidic devices such as micropumps or test cartridges for biomedical analysis. The valves are fabricated by a polymeric surface micromachining process, which utilizes SU-8 as the functional material. The devices are assembled with the lamination technique. A micro checkvalve consists of 3 layers: an inlet layer, a valve layer and an outlet layer. The valve is a disc of… Show more

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Cited by 94 publications
(81 citation statements)
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References 18 publications
(24 reference statements)
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“…Several novel approaches that have been utilized in microfluidic actuators/valves include hydraulically-actuated valves [11]; phase change valves operating with paraffin [12] and ice [13,14]; passive valves that take advantage of variations in surfaces' wetting properties [15]; check valves [16]; and viscosity-controlled valves. The latter types of valves operate with specialized fluids that change their viscosity in response to external stimuli such as temperatureresponsive pluronic solution [17] and a ferrofluid that responds to magnetic-field variations [18].…”
Section: Introductionmentioning
confidence: 99%
“…Several novel approaches that have been utilized in microfluidic actuators/valves include hydraulically-actuated valves [11]; phase change valves operating with paraffin [12] and ice [13,14]; passive valves that take advantage of variations in surfaces' wetting properties [15]; check valves [16]; and viscosity-controlled valves. The latter types of valves operate with specialized fluids that change their viscosity in response to external stimuli such as temperatureresponsive pluronic solution [17] and a ferrofluid that responds to magnetic-field variations [18].…”
Section: Introductionmentioning
confidence: 99%
“…For example, the mechanical properties of SU-8 have been exploited to make check valves. 19 Its surface properties have been exploited to make capillary electrophoresis chips. 20 Its ease of precise patterning has enabled the fabrication of electrospray tips.…”
Section: B Exploration Of Alternative Polymeric Materialsmentioning
confidence: 99%
“…During sucking process, the chamber volume increases, the inlet valve opens, outlet valve closes, the fluid gets into the chamber; during the discharging process, the chamber volume decreases, the outlet valve opens, inlet valve closes, the fluid gets out of the chamber. Cycle by cycle, the flow reaches in one direction [4,[13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%