2005
DOI: 10.1016/j.jeurceramsoc.2005.03.142
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MgO insulating films prepared by sol–gel route for SiC substrate

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Cited by 17 publications
(7 citation statements)
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References 6 publications
(5 reference statements)
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“…It has been suggested that this mechanism is more important for screening polar surfaces of smaller bandgap oxides such as SrTiO 3 (bandgap of 3.0 eV [39]) compared to wide bandgap insulators such as MgO (7.7 eV [41]). On this scale, LiNbO 3 with a bandgap of 3.75 eV [13] more closely resembles SrTiO 3 .…”
Section: Discussionmentioning
confidence: 99%
“…It has been suggested that this mechanism is more important for screening polar surfaces of smaller bandgap oxides such as SrTiO 3 (bandgap of 3.0 eV [39]) compared to wide bandgap insulators such as MgO (7.7 eV [41]). On this scale, LiNbO 3 with a bandgap of 3.75 eV [13] more closely resembles SrTiO 3 .…”
Section: Discussionmentioning
confidence: 99%
“…Piezoelectric microcantilever sensor ͑PEMS͒ consisting of a highly piezoelectric layer such as lead zirconate titanate 1 ͑PZT͒ or lead magnesium niobate-lead titanate 2,3 ͑PbMg 1/3 Nb 2/3 O 3 ͒ 0.63 -͑PbTiO 3 ͒ 0.37 ͑PMN-PT͒ bonded to a nonpiezoelectric layer such as tin is a new type of mass sensor that uses electrical means for detection and can be miniaturized for better mass detection sensitivity. 4 Most of the electrical insulation coating of miniaturized devices such as piezoelectric/piezoresistive microcantilever sensors and surface acoustic wave ͑SAW͒ sensors employed ceramic 5,6 or polymeric 7,8 coating deposited by high-vacuum deposition techniques. Other polymeric insulation coatings such as polyimides 9,10 and benzocyclobutene 11 ͑BCB͒ can be deposited by wet solution methods, and to be effective they require a thickness of tens of microns, which is too thick for PEMS applications.…”
mentioning
confidence: 99%
“…The organic-inorganic hybrid coatings can improve mechanical, physical characteristics together with durability and used particularly for improvement of resistance against electric insulation, oxidation and corrosion. [1][2][3][4] Sol-gel method is a chemical synthesis method employed in inorganic polymerization reaction for preparation of inorganic materials as a raw material for glass and ceramics. In the past 10 years, organic-inorganic hybrid nano composites prepared by the sol-gel method have been used in the areas of ceramics, polymer chemistry, organic and inorganic chemistry, and physics.…”
Section: Introductionmentioning
confidence: 99%