Metrological scanning probe microscope based on a quartz tuning fork detector

Babić, Bakir; Freund, Christopher H.; Herrmann, Jan; Lawn, M.A.; Miles, John

doi:10.1117/1.jmm.11.1.011003

Cited by 7 publications

(2 citation statements)

References 18 publications

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“…The instrument achieves traceability to the International System of Units (SI) by interferometric measurement, using a frequency stabilised laser, of the displacement of a sample translation stage, relative to a fixed tip mounted on a quartz tuning fork. The three-dimensional (3D) motion of the nano-positioning stage is measured by five interferometers, one for each of the three translational axes and two for monitoring stage rotations [4]. Geometric errors, such as Abbé errors, cosine errors and other alignment errors contribute to the uncertainty of the displacement measurements.…”

Section: Introductionmentioning

confidence: 99%

Local geometric error corrections for a metrological scanning probe microscope

Babić¹,

Coleman²,

Herrmann³

2020

Meas. Sci. Technol.

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A local geometric error correction method is developed for a metrological scanning probe microscope. The method corrects geometric errors in stage displacements using the interferometric measurements of angular position and known geometric offsets. Local and global error correction methods are considered and general scaling dependences on the number of measured steps or points are derived and compared. For the local method, the total uncertainty scales the same or decreases with a sufficient number of measurement steps compared with the global method. Implementation of the local geometric error correction method is demonstrated on measurements of a three-dimensional height standard artefact. The applied error correction method reduces the contribution of geometric errors to the uncertainty budget by two orders of magnitude. The presented approach can be extended to any scanning technique where a measurement translation mechanism can be identified and accurately quantified by relating the measured values with a measurand.

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Section: Introductionmentioning

confidence: 99%

Local geometric error corrections for a metrological scanning probe microscope

Babić¹,

Coleman²,

Herrmann³

2020

Meas. Sci. Technol.

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“…by combining the positioning stage with interferometric sensors. Various metrology SPM systems were constructed [1][2][3][4][5] and are nowadays key parts of the metrology traceability chain towards nanoscale. As SPM is now more widely used for characterization of industrial samples, novel requirements on its performance have arisen.…”

Section: Introductionmentioning

confidence: 99%

Gwyscan: a library to support non-equidistant scanning probe microscope measurements

Klapetek

Yacoot

Grolich

et al. 2017

Meas. Sci. Technol.

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We present a software library and related methodology for enabling easy integration of adaptive step (non-equidistant) scanning techniques into metrological scanning probe microscopes or scanning probe microscopes where individual x, y position data are recorded during measurements. Scanning with adaptive steps can reduce the amount of data collected in SPM measurements thereby leading to faster data acquisition, a smaller amount of data collection required for a specific analytical task and less sensitivity to mechanical and thermal drift. Implementation of adaptive scanning routines into a custom built microscope is not normally an easy task: regular data are much easier to handle for previewing (e.g. levelling) and storage. We present an environment to make implementation of adaptive scanning easier for an instrument developer, specifically taking into account data acquisition approaches that are used in high accuracy microscopes as those developed by National Metrology Institutes. This includes a library with algorithms written in C and LabVIEW for handling data storage, regular mesh preview generation and planning the scan path on basis of different assumptions. A set of modules for Gwyddion open source software for handling these data and for their further analysis is presented. Using this combination of data acquisition and processing tools one can implement adaptive scanning in a relatively easy way into an instrument that was previously measuring on a regular grid. The performance of the presented approach is shown and general non-equidistant data processing steps are discussed.

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The Challenge to Develop Metrology at the Nanoscale

Ince

2015

Low-Dimensional and Nanostructured Materials and Devices

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Metrological scanning probe microscope based on a quartz tuning fork detector

Cited by 7 publications

References 18 publications

Local geometric error corrections for a metrological scanning probe microscope

Local geometric error corrections for a metrological scanning probe microscope

Gwyscan: a library to support non-equidistant scanning probe microscope measurements

The Challenge to Develop Metrology at the Nanoscale

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