Methods for the measurement of thermal conductivity and thermal diffusivity of very thin films and foils

Völklein, F.; Kessler, Dipl-Phys E.

doi:10.1016/0263-2241(87)90027-3

Cited by 24 publications

(6 citation statements)

References 21 publications

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“…The inability to account exactly for the differences between the calculated and the actual temperature rise can be attributed to underlying uncertainties in some of the parameters used for calculation. The values of the accelerating voltages could be precisely read from the SEM, and the thermal conductivity—measured using various methods (Swann, 1959; Parrottet et al , 1975; Völklein et al , 1987; Rowe, 1995)—and the EB probe size—obtained through digital image processing (Oho et al , 1985)—were also set precisely ahead of the experiment. However, it remained difficult to obtain accurate conversion ratios or electron ranges.…”

Section: Resultsmentioning

confidence: 99%

Temperature distributions of electron beam‐irradiated samples by scanning electron microscopy

Tokunaga

Narushima

Yonezawa

et al. 2012

Journal of Microscopy

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SummaryAn electron beam (EB) generated by a scanning electron microscope (SEM) was used to irradiate two samples having different thermal conductivities, and the resulting temperatures of the EB-irradiated areas as well as the temperature distributions within the samples were then measured using a thermal camera. These measurements showed overall increases in sample temperatures, as well as revealed temperature rises at the EB-irradiated areas that had little difference with one of the theoretical predictions. Differences between the actual and the predicted temperature measurements were analysed in terms of the accuracy with which parameters could be estimated. The temperature distributions of the samples were measured and, On the basis of the results, it was hypothesized that the temperature differential over an irradiated sample will be inversely correlated with its thermal conductivity.

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Section: Resultsmentioning

confidence: 99%

Temperature distributions of electron beam‐irradiated samples by scanning electron microscopy

Tokunaga

Narushima

Yonezawa

et al. 2012

Journal of Microscopy

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“…The thermal conductivity was measured with the 3‐omega method with an accuracy of ±10%. [ 52 ] The accuracy of the Seebeck coefficient measurement was ±7%. [ 53 ]…”

Section: Methodsmentioning

confidence: 99%

Study of the Annealing Effects of Sputtered Bi₂Te₃Thin Films with Full Thermoelectric Figure of Merit Characterization

Naumochkin

Park

Nielsch

et al. 2021

Physica Rapid Research Ltrs

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Micro‐thermoelectric (TE) devices have a great potential for future applications in the field of energy harvesting to power autonomous sensors. Bi2Te3 sputtered at elevated substrate temperatures exhibits a high figure of merit (ZT) suitable for the fabrication of micro‐TE devices. However, a lift‐off process that does not allow higher substrate temperatures is often used, and although Bi2Te3 is a well‐studied TE material, it lacks full ZT characterization of thin films. Herein, the full TE characterization of sputtered Bi2Te3 thin films is presented, including the charge carrier concentration and mobility, which are deposited at room temperature and postannealed between 150 and 300 °C. The influence of the annealing time and temperature is investigated on a 90 nm‐thick Bi2Te3 film. A maximum ZT of 0.20 is found, which results from the increasing crystallinity and reduction of point defects. To investigate the thickness dependency, Bi2Te3 films with thicknesses of 90, 170, 350, and 470 nm are annealed at 250 °C. A maximum ZT value of 0.26 is observed for the 350 nm Bi2Te3 film. Furthermore, it can be shown that with increasing film thickness, the annealing time has to be increased to maximize ZT.

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“…Because the thermal sink is positioned at the structure's edge, the in-plane thermal flow is ensured, and thus the temperature rise is governed by f,∥. [80] The chip incorporates a rectangular suspended dielectric (e.g., SiNx) membrane with a thickness of 50 to 100 nm. This membrane serves as a substrate on which the film specimen can be deposited.…”

Section: In-plane Thermal Conductivity (F∥) Measurement Volklein Met...mentioning

confidence: 99%

A short account of thermoelectric film characterization techniques

Nandihalli

2023

Materials Today Physics

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Methods for the measurement of thermal conductivity and thermal diffusivity of very thin films and foils

Cited by 24 publications

References 21 publications

Temperature distributions of electron beam‐irradiated samples by scanning electron microscopy

Temperature distributions of electron beam‐irradiated samples by scanning electron microscopy

Study of the Annealing Effects of Sputtered Bi₂Te₃Thin Films with Full Thermoelectric Figure of Merit Characterization

A short account of thermoelectric film characterization techniques

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Methods for the measurement of thermal conductivity and thermal diffusivity of very thin films and foils

Cited by 24 publications

References 21 publications

Temperature distributions of electron beam‐irradiated samples by scanning electron microscopy

Temperature distributions of electron beam‐irradiated samples by scanning electron microscopy

Study of the Annealing Effects of Sputtered Bi2Te3Thin Films with Full Thermoelectric Figure of Merit Characterization

A short account of thermoelectric film characterization techniques

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Product

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About

Study of the Annealing Effects of Sputtered Bi₂Te₃Thin Films with Full Thermoelectric Figure of Merit Characterization