Methodology for the Selection of Technological Modes for the Synthesis of Transparent Conducting Oxides with Desired Properties

Abstract

Transparent conducting oxides (TCOs) are widely used as a transparent electrode in various fields of opto-and semiconductor electronics. The main materials used today are indium-tin oxide, tin-antimony oxide and zinc-aluminum oxide. The authors have developed and improved the spray-pyrolysis method, which is one of the most promising methods of implementation in production. In this work, the study of tin dioxide doped with antimony coatings and the development of a methodology for the controlled synthesis of TCO, taking into account the effect of technological modes of deposition on the TCO parameters. The results of the performed studies contribute to the development of an automated technology for the synthesis of transparent conducting oxides with desired properties.