Automated system for measuring electrophysical parameters of semiconductor structures
E. A. Pecherskaya,
O. V. Karpanin,
D. E. Tuzova
et al.
Abstract:сThe article is devoted to the development of an automated information and measurement system for measuring the voltfarad characteristics of semiconductor structures, including structures based on transparent conductive coatings. The structure of the information-measuring system is proposed, the results of functional and metrological analysis of the measurement channel of complex conductivity are presented. In particular, as a result of functional analysis, the functions of converting complex conductivity into… Show more
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