Metallic submicrometer sieves fabricated by interferometric lithography and electroforming

Gutierrez-Rivera, Luis; Carvalho, E. J.; Silva, Maria Aparecida da; Cescato, Lucila

doi:10.1088/0960-1317/15/10/020

Cited by 17 publications

(18 citation statements)

References 12 publications

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“…3(b)). Although the interference lithography may generate a large variety of "r/a" ratios, there are preferential geometries that are less sensitive to the process errors [20].…”

Section: The Fabrication Processmentioning

confidence: 99%

Band gap of hexagonal 2D photonic crystals with elliptical holes recorded by interference lithography

Quiñónez¹,

Menezes²,

Cescato³

et al. 2006

Opt. Express

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Two-dimensional hexagonal photonic crystals can be recorded using the simple superimposition of two interference patterns rotated by 60 masculine. Such process generates high contrast masks, however, it generates elliptical cross section structures instead of cylinders. We study the PBG properties of the experimentally feasible geometries, using this technique and we demonstrate that the effect of this asymmetric shape is a reduction in the PBG map area, for TE polarization, in comparison with cylindrical structures. On the other hand, it appears a PBG for TM polarization.

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“…3(b)). Although the interference lithography may generate a large variety of "r/a" ratios, there are preferential geometries that are less sensitive to the process errors [20].…”

Section: The Fabrication Processmentioning

confidence: 99%

Band gap of hexagonal 2D photonic crystals with elliptical holes recorded by interference lithography

Quiñónez¹,

Menezes²,

Cescato³

et al. 2006

Opt. Express

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“…36 (PLLA). 27,37,39,40 However, no molecular transport data revealing the performance of these devices have been presented thus far.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of functional silicon-based nanoporous membranes

Ileri

Stroeve

Palazoğlu

et al. 2012

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Macroscopic porous membranes with pore diameter uniformity approaching the nanometer scale have great potential to significantly increase the speed, selectivity, and efficiency of molecular separations. We present fabrication, characterization, and molecular transport evaluation of nanoporous thin silicon-based sieves created by laser interferometric lithography (LIL). This fabrication approach is ideally suited for the integration of nanostructured pore arrays into larger microfluidic processing systems, using a simple all-silicon lithographic process. Submillimeter-scale planar arrays of uniform cylindrical and pyramidal nanopores are created in silicon nitride and silicon, respectively, with average pore diameters below 250 nm and significantly smaller standard error than commercial polycarbonate track etched (PCTE) membranes. Molecular transport properties of short cylindrical pores fabricated by LIL are compared to those of thicker commercial PCTE membranes for the first time. A 10-fold increase in pyridine pore flux is achieved with thin membranes relative to commercial sieves, without any modification of the membrane surface.

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“…There are several papers concerning micro-sieve fabrication (Rijn et al, 1999;Gutierrez-Rivera et al, 2005;Gutierrez-Rivera et al, 2008), but the characterization of such sieves has concentrated on studies of flux (Brans et al, 2006) and fouling effects (Chandler and Zydney, 2006). The ability of the sieves to separate particles by size or size exclusion is much less investigated in the literature.…”

Section: Introductionmentioning

confidence: 99%

Characterization of the selectivity of microsieves using a cross-flow microfiltration system

Gutierrez-Rivera

Katekawa

Silva

et al. 2010

Braz. J. Chem. Eng.

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-Filtration through membranes is a process largely employed in the food and chemical industry to separate particles. Sieves present some advantages in relation to conventional membranes such as high homogeneity in the pore sizes, smooth surfaces, straight-through pores, etc. In this paper we compare the selectivity in the exclusion of particles by size of sieves with circular and slit pores with the same porosity. The selectivity was investigated by filtering a mixture of rutin in water in a cross-flow filtration system. The particle-size distribution of the rutin solution was measured before and after microfiltration. The results showed a high efficiency in the size exclusion of particles for microsieves with circular pores. The filtration through a commercial membrane (net filter) with similar characteristics was also characterized for comparison.

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Metallic submicrometer sieves fabricated by interferometric lithography and electroforming

Cited by 17 publications

References 12 publications

Band gap of hexagonal 2D photonic crystals with elliptical holes recorded by interference lithography

Band gap of hexagonal 2D photonic crystals with elliptical holes recorded by interference lithography

Fabrication of functional silicon-based nanoporous membranes

Characterization of the selectivity of microsieves using a cross-flow microfiltration system

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