Metal Oxides/Carbon Felt Pressure Sensors with Ultra‐Broad‐Range High Sensitivity

Abstract

Flexible piezoresistive pressure sensors have been extensively used in the field of wearable sensors. However, it is difficult to achieve both ultrahigh sensitivity and pressure range, with traditional pressure sensors. Therefore, a new Co3O4/carbon felt pressure sensor is proposed here, where Co3O4 as nanospacer provides low initial current without loading. Carbon felt with a rough surface as a flexible substrate provides a high output current under loading and extends the measurement range of the pressure sensors. The high sensitivity of the pressure sensors can be achieved with a low initial current and high output current. The Co3O4/carbon felt pressure sensors exhibit high sensitivity (243 kPa−1), ultralow detection limit (1.3 Pa), fast response (14 ms), and broad range (up to 180 kPa) of measurements. These excellent performances indicate that the Co3O4/carbon felt pressure sensor has great potential for application in wearable, healthcare devices. Furthermore, this strategy can be extended to the fabrication of other metal oxides/carbon felt pressure sensors.

Recent progress in flexible micro-pressure sensors for wearable health monitoring

“…The fabricated pressure sensors exhibit high sensitivity (243 kPa −1 ) and a broad range (up to 180 kPa) of measurements. 139 4 Recent advances of capacitive micro-pressure sensors for wearable health monitoring A typical capacitive pressure sensor includes a dielectric layer and electrodes on both sides. The sensor will deform when the pressure/strain is applied, causing the change of capacitance, thus completing the transformation of the pressure signal to the electrical signal.…”

“…The fabricated pressure sensors exhibit high sensitivity (243 kPa −1 ) and a broad range (up to 180 kPa) of measurements. 139 …”

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