2011
DOI: 10.1364/oe.19.00a234
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Metal-nitride-oxide-semiconductor light-emitting devices for general lighting

Abstract: Abstract:The potential for application of silicon nitride-based light sources to general lighting is reported. The mechanism of current injection and transport in silicon nitride layers and silicon oxide tunnel layers is determined by electro-optical characterization of both bi-and tri-layers. It is shown that red luminescence is due to bipolar injection by direct tunneling, whereas Poole-Frenkel ionization is responsible for blue-green emission. The emission appears warm white to the eye, and the technology h… Show more

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Cited by 21 publications
(18 citation statements)
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References 27 publications
(41 reference statements)
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“…Silicon based light sources have been widely investigated for their implementation in integrated photonic circuits [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…Silicon based light sources have been widely investigated for their implementation in integrated photonic circuits [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…10 Also, we have recently demonstrated the suitability of SiN x , in combination with SiO 2 tunnel layers, as promising candidate for the silicon-solid state lighting. 11 Thus, an encouraging scenario toward RE-doped SiN x LEDs is envisaged. We are only aware of Er-doped SiN x electroluminescent devices, where the potentiality of this material for the engineering of light emitters at 1.5 lm was reported.…”
mentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8][9][10] Silicon-rich silicon nitride (SRSN) and silicon-rich silicon oxide (SRSO) materials have mostly been considered due to their good emission properties (under optical and electrical excitation) and compatibility with the mainstream complementary metal oxide semiconductor (CMOS) technology. [1][2][3][4][5][6][7][8] Much effort has been dedicated to improve the electroluminescence (EL) intensity as well as the efficiency of the light-emitting devices.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] Published works span from those centering the attention on the material optimization in terms of the different fabrication processes, 6,7 to those that mostly focus on the electrical and EL properties. [8][9][10] Efficient light-emitting devices have already been demonstrated using either SRSN or SRSO films. 2,4 In former papers, we have reported the development of metal-nitride-oxide-semiconductor light-emitting devices that we called MNOSLEDs.…”
Section: Introductionmentioning
confidence: 99%
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