2018
DOI: 10.1016/j.ijleo.2018.06.099
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Metal micro-hole formation without recast layer by laser machining and electrochemical machining

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Cited by 21 publications
(5 citation statements)
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“…Tsao et al [13] studied the mechanism of laser-assisted improvement of chemical etching localization and realized the processing of microgrooves with a width of 2 μm. Sun et al [14] carried out electrochemical machining of laser-processed prefabricated micro holes with tube electrodes. Thus, compared with laser processing, results showed that there was no sputtering on the surface of the material processed by LECM, and there was no recast layer on the side wall of the micro holes.…”
Section: Introductionmentioning
confidence: 99%
“…Tsao et al [13] studied the mechanism of laser-assisted improvement of chemical etching localization and realized the processing of microgrooves with a width of 2 μm. Sun et al [14] carried out electrochemical machining of laser-processed prefabricated micro holes with tube electrodes. Thus, compared with laser processing, results showed that there was no sputtering on the surface of the material processed by LECM, and there was no recast layer on the side wall of the micro holes.…”
Section: Introductionmentioning
confidence: 99%
“…The laser was used to carry out the thermal softening of the hard material while the mechanical interaction between the cutting tool and the workpiece was in progress. Sun et al [23], proposed sequential hybrid micromachining combining LBMM and electrochemical micromachining (EMM). They [23] have successfully managed to remove the recast layer machined holes formed during the LBMM process by the subsequent EMM nishing operation.…”
Section: Introductionmentioning
confidence: 99%
“…Sun et al [23], proposed sequential hybrid micromachining combining LBMM and electrochemical micromachining (EMM). They [23] have successfully managed to remove the recast layer machined holes formed during the LBMM process by the subsequent EMM nishing operation. Some other reported Laser-assisted machining technologies include Laser-assisted turning [24], Laser-assisted milling [25], Laser-assisted waterjet machining [26].…”
Section: Introductionmentioning
confidence: 99%
“…Long et al [18] designed a kind of immersed laser-ECM experiment, in which a 0.2 mm thick stainless steel workpiece was immersed in NaCl (0.5 mol l −1 ) solution, it took them 8 min to drill an aspect ratio limited through hole. Sun et al [19] used a conventional tube cathode to remove the laser induced RL, though RL was successfully removed by ECM, their experimental result was far from enough, only some very shallow pits were drilled on the workpiece.…”
Section: Introductionmentioning
confidence: 99%