2003
DOI: 10.1143/jjap.42.1933
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Metal-Induced Solid-Phase Crystallization of Amorphous SiGe Films on Insulator

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Cited by 18 publications
(19 citation statements)
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“…Recently, there are also some reports on the synthesis of GeSn [21][22][23] and SiGe [20,24,25]. However, there is no experimental report on the synthesis of SnC.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, there are also some reports on the synthesis of GeSn [21][22][23] and SiGe [20,24,25]. However, there is no experimental report on the synthesis of SnC.…”
Section: Introductionmentioning
confidence: 99%
“…However, the regrown regions showed dendritelike morphology. 10 Recently, Yamaguchi et al 11 have reported the enhancement of solid-phase crystallization in the a-Si/ a-Ge layered structures, i.e., nucleation was initiated in a-Ge layers, and the nuclei acted as a seed for crystallization of a-Si layers. This triggered the following idea: If a-Ge/ a-Si layered structures were employed in MILC processing, crystal nucleation should be initiated in a-Ge layers, which would stimulate bond rearrangement in a-Si layers.…”
mentioning
confidence: 99%
“…In our previous study [11][12][13][14] in MILC of SiGe ͑Ge: 40%-60%͒, the dendrite-morphological growth was dominantly observed after 550°C ͑4 h͒ annealing. To understand apparently different results shown in present and previous studies, we speculate that needlelike growth initiates in SiGe-MILC and followed by circular grain growth.…”
mentioning
confidence: 85%
“…9,10 Recently, we tried SiGe growth by the MILC method and demonstrated low-temperature ͑Ͻ550°C͒ formation of poly-SiGe with whole Ge compositions ͑0%-100%͒. [11][12][13][14] However, crystalmorphologies after MILC significantly depended on the Ge compositions and annealing temperatures, e.g., the dendrite morphology became dominant for intermediate Ge compositions ͑40%-60%͒ at 550°C. [11][12][13][14] Understanding of such Ge dependent phenomena is essential to apply the MILC for TFT fabrication process.…”
mentioning
confidence: 99%