2013
DOI: 10.1002/adma.201303452
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Metal‐Containing Block Copolymer Thin Films Yield Wire Grid Polarizers with High Aspect Ratio

Abstract: Highly selective etch masks are formed by thin films of a polystyrene-b-poly(ferrocenylisopropylmethylsilane) diblock copolymer, PS-PFiPMS, containing hemicylindrical domains of PFiPMS. These domains, with a period of 35 nm, are readily aligned through mechanical shear. Aligned PS-PFiPMS templates are employed to fabricate high-aspect-ratio nanowire grids from amorphous silicon, which can polarize deep ultraviolet radiation, including 193 nm, at >90% efficiency.

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Cited by 59 publications
(67 citation statements)
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“…Figure illustrates schematic procedure for the controlled segmentation of metal nanowire arrays. Asymmetric BCP polystyrene‐ block ‐poly(2‐vinylpyridine) (PS‐ b ‐P2VP) thin film was spin‐cast on a substrate and self‐assembled into aligned surface parallel nanocylinder arrays via thermal annealing with external shear stress (Figure S1, Supporting Information) . The resultant nanoscale morphology in the BCP thin film was observed with scanning electron microscope (SEM).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Figure illustrates schematic procedure for the controlled segmentation of metal nanowire arrays. Asymmetric BCP polystyrene‐ block ‐poly(2‐vinylpyridine) (PS‐ b ‐P2VP) thin film was spin‐cast on a substrate and self‐assembled into aligned surface parallel nanocylinder arrays via thermal annealing with external shear stress (Figure S1, Supporting Information) . The resultant nanoscale morphology in the BCP thin film was observed with scanning electron microscope (SEM).…”
Section: Resultsmentioning
confidence: 99%
“…To date, many successful approaches for directed self‐assembly have been introduced to control the orientation and lateral ordering of BCP nanodomains. However, crucial limitations still remain: the direction of self‐assembled BCP nanostructure is subordinate to that of an external guidance such as physical geometry, chemical contrast, external field, and so on. We note a small modification of the presented study can circumvent the limitation.…”
Section: Resultsmentioning
confidence: 99%
“…However, processes requiring vacuum evaporation and RIE may be insufficiently cost‐effective and high‐throughput to manufacture Al WGPs. Bottom‐up approaches to fabricate WGPs have been attempted, such as colloidal assembly, metal‐containing block copolymers, and nanowire alignment . However, the limitations of the material selection and structural versatility caused unsatisfactory WGP performance.…”
Section: Introductionmentioning
confidence: 99%
“…As a consequence, the lateral ordering of the BCP microdomains is significantly promoted. Although thermal annealing is an effective method to create ordered morphologies [4][5][6][7][8][9][10][11], application of high temperatures to BCP thin films may result in the degradation of one or more blocks, causing the final morphology to deteriorate [12][13][14][15][16][17][18][19][20]. This can also bring a loss to the long-range ordering of the morphology [16,17,21].…”
Section: Introductionmentioning
confidence: 99%