SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest
DOI: 10.1109/sispad.1997.621359
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Mesoscale modeling of diffusion in polycrystalline structures

Abstract: We present a new diffusion simulation methodology which has been developed as part of our BackEnd Simulation Tool (BEST) effort. This approach uses the finite element method to address issues critical for modeling polycrystalline materials at the mesoscopic scale. We have included separate grain and grain boundary diffusion, spatially continuous material properties and the concept of equilibrium concentration.

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Cited by 5 publications
(3 citation statements)
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“…Many reports consider models with square grains surrounded by GB [12,15,19,34]. Very often, they consider that the concentration within GB width is constant and unchanging.…”
Section: Kinetic Modelmentioning
confidence: 99%
“…Many reports consider models with square grains surrounded by GB [12,15,19,34]. Very often, they consider that the concentration within GB width is constant and unchanging.…”
Section: Kinetic Modelmentioning
confidence: 99%
“…There are several models to compute the effective diffusivity of a heterogeneous material as a function of its grain size [11] [12] [13]. Hart's model [14] considers parallel grain boundaries oriented in the diffusion direction.…”
Section: Introductionmentioning
confidence: 99%
“…Also, some authors studied the grain boundary diffusion effect on the effective diffusivity with numerical methods. Gryaznov et al [20] and Bassman et al [21] have made a finite element analysis considering two different media: grains and grain boundaries. This type of methodology has also been applied with the finite difference method [22] or by computation of the effective conductivity of two dimensional disordered random Voronoi networks [23] with Kirchhoff equations resolved by Lanczos algorithm [24].…”
Section: Introductionmentioning
confidence: 99%