2017
DOI: 10.1088/1361-665x/aa9366
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Meso scale flextensional piezoelectric actuators

Abstract: We present an ultra-thin meso scale piezoelectric actuator consisting of a piezoceramic beam and a carbon fiber displacement-amplification frame. We show that the actuator can be designed to achieve a wide range of force/displacement characteristics on the mN/μm scales. The best performing design achieved a free displacement of 106 μm and a blocked force of 73 mN, yielding a total energy density of 0.51 Jkg 1 for the 7.6 mg system. We describe a printed circuit MEMS process for fabricating the actuator that in… Show more

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Cited by 17 publications
(16 citation statements)
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References 26 publications
(34 reference statements)
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“…Designing metallic structures capable of large thermal expansion involves engineering mesoscale architectures that can leverage the small thermal strains typical of metals (∼ 10 −6 / • C) to produce large global displacements. In other contexts, e.g., to amplify piezoelectric strains [40][41][42][43][44][45][46], to harvest energy [47,48] or attenuate vibrations [49][50][51], a similar goal has been achieved using displacement amplification mechanisms. Typically, these mechanisms comprise a combination of rigid links and compliant hinges designed to leverage geometric constraining.…”
Section: Introductionmentioning
confidence: 99%
“…Designing metallic structures capable of large thermal expansion involves engineering mesoscale architectures that can leverage the small thermal strains typical of metals (∼ 10 −6 / • C) to produce large global displacements. In other contexts, e.g., to amplify piezoelectric strains [40][41][42][43][44][45][46], to harvest energy [47,48] or attenuate vibrations [49][50][51], a similar goal has been achieved using displacement amplification mechanisms. Typically, these mechanisms comprise a combination of rigid links and compliant hinges designed to leverage geometric constraining.…”
Section: Introductionmentioning
confidence: 99%
“…A microgripper implementation has recently been reported by York et al, achieving a 106 µm free displacement and 73 mN of blocked force, from an 8 mm long piezoelectric beam [3] and 300 V. A photograph of this microgripper illustrating clearly the bridge-and-lever structure combination is shown in Fig. 13.…”
Section: Flextensional Mechanismsmentioning
confidence: 97%
“…Both methods can result in motion output in the tens of nanometers per volt range. For example, the PZT beam of [3] achieves displacement of several micrometers at 300 V, while the Multi Layer Actuators of Cedrat Technologies provide displacements up to 20 µm [4]. The ultimate limiting factor of practically achievable stroke by an active material layer is its tensile strength or dielectric breakdown limit.…”
Section: Actuation Mechanismsmentioning
confidence: 99%
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“…In both cases, the size of the final components was a few centimeters, but neither work characterized the dynamic behavior of the compliant element. York et al [24] designed an actuator 8 mm in length, with a travel range of a few hundredths of a millimeter. A transient response analysis was also conducted, in preparation for high speed actuation applications.…”
Section: Literature Reviewmentioning
confidence: 99%