MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors

Wei, Lei; You, Zhiwei; Kuai, Xuebao; Zhang, Mingliang; Fh, Yang; Wang, Xiaodong

doi:10.1007/s00542-022-05391-9

Cited by 9 publications

(5 citation statements)

References 101 publications

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“…According to Equation (11), the amplitude or phase of subtraction components behave as frequency functions. Subsequently, these baseline equations are subtracted from the amplitude and phase signals measured by the sensors, in accordance with Equation (12). The optimized spectra are then meticulously computed utilizing the formulations in Equations ( 13) and ( 14).…”

Section: Spectral Response Optimization Methods and Experimental Eval...mentioning

confidence: 99%

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Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors

Setiono,

Nelfyenny,

Nyang’au

et al. 2024

Sensors

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Electrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic effect on the resonant sensor during the actuating-sensing process leads to asymmetric amplitude and reversing phase spectral responses. Such a condition affects the precise determination of the cantilever’s resonant frequency, f0. Moreover, in the context of phase-locked loop-based (PLL) resonance tracking, a reversing phase spectral response hinders the resonance locking due to its ambiguity. In this work, a replica of the baseline spectral was applied to remove the thermal parasitic effect on the resonance spectra of the cantilever sensor, and its capability was simulated through mathematical analysis. This replica spectral was subtracted from the parasitized spectral using a particular calculation, resulting in optimized spectral responses. An assessment using cigarette smoke particles performed a desired spectral shifting into symmetrical amplitude shapes and monotonic phase transitions, subsequently allowing for real-time PLL-based frequency tracking.

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Section: Spectral Response Optimization Methods and Experimental Eval...mentioning

confidence: 99%

“…Thermally actuated piezoresistive MEMS microsystems are capable of measuring at a high resolution [10][11][12][13] due to their small size. Electrothermal-based propulsion systems benefit from low fabrication complexity and high responsivity [14].…”

Section: Introductionmentioning

confidence: 99%

Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors

Setiono,

Nelfyenny,

Nyang’au

et al. 2024

Sensors

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“…In particular, magnetically actuated MEMS resonators can be used in antennas with impedance matching of 50 Ω; the volume of the device is several orders of magnitude smaller than that of traditional antennas. Some MEMS resonators are applied to low frequency applications through thermal driving [34]. Thermally driven resonators typically rely on the piezoresistive effect for signal detection [34].…”

Section: Transduction Mechanismsmentioning

confidence: 99%

“…Some MEMS resonators are applied to low frequency applications through thermal driving [34]. Thermally driven resonators typically rely on the piezoresistive effect for signal detection [34]. Thermally driven resonators have the strong driving ability, small film damping, and simple structure [35].…”

Section: Transduction Mechanismsmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

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“…It is difficult to apply to different material structures due to the different temperature-sensitive characteristics. The external force control method changes the resonant frequency using residual internal stress [23], electric field force, and magnetic field force [24]. Compared with other control technologies, the external force adjustment method is an online control technology, which is beneficial to the sensitivity and stability of the micro-mechanical gyro system with its high flexibility and strong universality [25].…”

Section: Introductionmentioning

confidence: 99%

Adaptive Fuzzy Modal Matching of Capacitive Micromachined Gyro Electrostatic Controlling

Cheng,

Liu,

Guo

et al. 2023

Sensors

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A fuzzy PI controller was utilized to realize the modal matching between a driving and detecting model. A simulation model was built to study electrostatic decoupling controlling technology. The simulation results show that the modal matching can be gained by the fuzzy PI controller. The frequency difference between the driving mode and the detection mode is less than 1 Hz, and the offset of the input DC is smaller than 0.6 V. The optimal proportionality factor and integral coefficient are 1.5 and 20, respectively. The fuzzy PI controlling technology provides a good way for the parameter optimization to gain modal matching of micro gyro, via which the detecting accuracy and stability can be improved greatly.

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MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors

Cited by 9 publications

References 101 publications

Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors

Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Adaptive Fuzzy Modal Matching of Capacitive Micromachined Gyro Electrostatic Controlling

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