Smart Systems Integration and Simulation 2016
DOI: 10.1007/978-3-319-27392-1_6
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MEMS System-Level Modeling and Simulation in Smart Systems

G. Schropfer
1
,
G. Lorenz
2
,
Arnaud Krust
3
et al.
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Cited by 3 publications
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References 19 publications
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High order MEMS models for system design

Asselot
1
,
Krust
2
,
Parent
3
et al. 2018
2018 IEEE International Symposium on Circuits and Systems (ISCAS)
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High order MEMS models for system design

Asselot
1
,
Krust
2
,
Parent
3
et al. 2018
2018 IEEE International Symposium on Circuits and Systems (ISCAS)
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0
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Full Custom MEMS Design: 2.5D Fabrication-Process Simulation for 3D Field-Solver-Based Circuit Extraction

Hald
1
,
Marquardt2,
Herzogenrath
3
et al. 2019
IEEE Sensors J.
1
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Parasitic Extraction Methodology for MEMS Sensors with Active Devices

Hald
1
,
Wolf
2
,
Seelhorst
3
et al. 2019
2019 16th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (
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