High order MEMS models for system design

Asselot, Joan; Krust, Arnaud; Parent, Arnaud; Welham, Chris

doi:10.1109/iscas.2018.8351644

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2018 IEEE International Symposium on Circuits and Systems (ISCAS) 2018

DOI: 10.1109/iscas.2018.8351644

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High order MEMS models for system design

Joan Asselot

Arnaud Krust

Arnaud Parent

et al.

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High order MEMS models for system design

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