MEMS switchable interdigital coplanar filter

Fourn, Erwan; Pothier, A.; Champeaux, Corinne; Tristant, Pascal; Catherinot, A.; Blondy, Pierre; Tanné, Gérard; Rius, Éric; Person, Christian; Huret, Fabrice

doi:10.1109/tmtt.2002.806517

Cited by 93 publications

(33 citation statements)

References 7 publications

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“…With the electrode separation varying from 1.8 mm down to 1.2 mm, the center frequency could be tuned from 40.4 GHz down to 37.8 GHz. Fourn et al [56] then went on to demonstrate another distributed-element RF MEMS filter; cantilever-type capacitive membrane switches were incorporated into the open circuit ends of interdigital CPW resonators. By switching-in an extra section of line, the physical and electrical lengths of the resonators increase, thus, reducing the pass band …”

Section: Impedance Tuners and Filtersmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

124

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A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced integrated subsystems. An overview of the associated fabrication technologies is given, in order to distinguish between the two distinct classes of RF microsystems' component technologies; non-MEMS micromachined and true MEMS. An extensive literature survey has been undertaken and key papers have been cited; from these, the motivations behind different RF MEMS technologies are highlighted. The importance of understanding the limitations for realising new and innovative ideas in RF MEMS is discussed. Finally, conclusions are drawn as to where future RF MEMS technology may lead. It is likely that the switch will continue to be the most important RF MEMS component, with future work investigating its enhanced functionality, subsystem integration and volume production. The focus of RF MEMS circuits will shift from the digital phase shifter to high-Q tuneable filters.

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Section: Impedance Tuners and Filtersmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

124

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“…In a 2 nd -order structure, this kind of topology principally consists of coupled lines associated with matching stubs. Indeed, by considering the coupled-line section as constant, the central frequency can be easily tuned by varying the stub end [12,13]. This led us to develop two filters implemented in microstrip technology on a classical AR1000 substrate and based on similar coupled-lines sections, but with either short-circuited stubs or open-circuited ones (Fig.…”

Section: Combination Of Two Bandpass Filtersmentioning

confidence: 99%

Some topologies and associated techniques used to design planar dual-band filters

Quendo

Rius

Person

2005

Microw. Opt. Technol. Lett.

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“…RF-MEMS switches offer a simple yet effective solution to provide reconfiguration in multimodal circuits since these require a selective control of each CPW mode (even (Llamas et al 2010; and odd , which can be accomplished only in particular cases using semiconductor switches (Contreras et al 2011). Uniplanar topologies using a single-mode (even mode only) classical design approach have also been extensively reported in the literature to implement a variety of MEMS-reconfigurable RF and microwave devices, in particular phase shifters (Van Caekenberghe et al 2008) and filters (Nordquist et al 2004;Fourn et al 2003;Ocera et al 2006;Pothier et al 2005;Yuk et al 2012;Park et al 2006;Nordquist et al 2005;Reines eut al. 2008;Entesari et al 2005;Scarbrough et al 2009).…”

Section: Introductionmentioning

confidence: 99%

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

et al. 2017

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Aquesta és una còpia de la versió author's final draft d'un article publicat a la revista Microsystem technologies.La publicació final està disponible a Springer a través de http://dx.doi.org/10.1007/s00542-017- This is a copy of the author 's final draft version of an article published in the journal Microsystem technologies. Abstract. In this paper, new RF-MEMS switch configurations are proposed to enable control of the propagating (even and odd) modes in multimodal CPW transmission structures. Specifically, a switchable air bridge (a switchable short-circuit for the CPW odd mode) and switchable asymmetric shunt impedances (for transferring energy between modes) are studied and implemented using bridge-type and cantilever-type ohmic-contact switches, respectively. The switchable air bridge is based in a novel double ohmic-contact bridge-type structure. Optimized-shape suspension configurations, namely folded-beam or diagonal-beam for bridge-type switches, and straight-shaped or semicircular-shaped for cantilever-type switches, are used to obtain robust structures against fabrication-stress gradients. The switches are modelled using a coupled-field 3D finite-element mechanical analysis showing a low to moderate pull-in voltage. The fabricated switches are experimentally characterized using S-parameter and DC measurements. The measured pull-in voltages agree well with the simulated values. From S-parameter measurements, an electrical model with a very good agreement for both switch states (ON and OFF) has been obtained. The model is used in the design of reconfigurable CPW multimodal microwave filters.

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MEMS switchable interdigital coplanar filter

Cited by 93 publications

References 7 publications

Review of radio frequency microelectromechanical systems technology

Review of radio frequency microelectromechanical systems technology

Some topologies and associated techniques used to design planar dual-band filters

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

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