Review of radio frequency microelectromechanical systems technology

Abstract

A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced integrated subsystems. An overview of the associated fabrication technologies is given, in order to distinguish between the two distinct classes of RF microsystems' component technologies; non-MEMS micromachined and true MEMS. An extensive literature survey has been undertaken and key papers have been cited; from these, the motivations behind different RF MEMS technologies are highlighted. The importance of understanding the limitations for realising new and innovative ideas in RF MEMS is discussed. Finally, conclusions are drawn as to where future RF MEMS technology may lead. It is likely that the switch will continue to be the most important RF MEMS component, with future work investigating its enhanced functionality, subsystem integration and volume production. The focus of RF MEMS circuits will shift from the digital phase shifter to high-Q tuneable filters.

Performance of RF MEMS switches at low temperatures

“…Equation (1) assumes that the actuators are solid bars and so would tend to overestimate the true value as the actuators have hinged sections to allow easier bending. Fig.…”

“…For instance, using RF MEMS switches, RF circuits such as variable capacitors, tunable filters, phase shifters and signal routers have been demonstrated [1]. Recently, there has been research interest in the application of the high-Tc superconductor (HTS) in combination with RF MEMS devices.…”

Electromagnetic Force on Anisotropic-Conducting Film

“…The reported device types include switches, impedance tuners, tunable or reconfigurable filters, phase shifters and MEMS-based antennas [1][2][3][4][5][6][7][8]. However, it is hard to find a report on wireless devices playing a similar role of motor or actuator with continuously moving parts, because the principles based on rotating electric or magnetic field and independent electric and magnetic circuits will never work in RF or microwave frequency.…”

Modelagem de chaves MEMS para aplicações em RF.

“…Assim, nem todos os componentes miniaturizados são MEMS, pois nem todos componentes miniaturizados possuem atuadores [4].…”