MEMS Scanning Mirrors for Optical Coherence Tomography

Gorecki, Christophe; Bargiel, Sylwester

doi:10.3390/photonics8010006

Cited by 25 publications

(13 citation statements)

References 67 publications

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“…MEMS mirrors are known to exhibit inter-axis crosstalk in which the sensitivity of mirror tilt angle to applied voltage in the 𝑥 axis depends on the tilt angle in the 𝑦-axis and vice versa [34][35][36]. Using a similar MEMS scanner to the one in our system, Kim et al determined angular error during dual axis scanning due to crosstalk to be as high as 6.13% depending on MEMS scanner alignment [37].…”

Section: Lateral Angular Distortion Correctionmentioning

confidence: 99%

Geometrically accurate real-time volumetric visualization of the middle ear using optical coherence tomography

Adamson¹,

Farrell²,

Wang³

et al. 2023

Preprint

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We introduce a novel system for geometrically accurate , continuous, live, volumetric middle ear optical coherence tomography imaging over a 13 mm × 30° × 30° field of view from a handheld imaging probe. The system employs a discretized spiral scanning (DC-SC) pattern to rapidly collect volumetric data and applies real-time scan conversion and lateral angular distortion correction to reduce geometric inaccuracies to below the system’s lateral resolution over 91% of the field of view. We validate the geometric accuracy of the resulting images through comparison with co-registered micro-computed tomography (micro-CT) volumes of a phantom target and a cadaveric middle ear. The system’s real-time volumetric imaging capabilities are assessed by imaging the ear of a healthy subject while performing dynamic pressurization of the middle ear in a Valsalva maneuver.

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Section: Lateral Angular Distortion Correctionmentioning

confidence: 99%

Geometrically accurate real-time volumetric visualization of the middle ear using optical coherence tomography

Adamson¹,

Farrell²,

Wang³

et al. 2023

Preprint

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“…The LD unit also gives a start trigger (A-trigger) for the depth scan (A-scan) that could be used to initiate the spatial beam steering (B-scan), for which MEMS optical scanners are frequently used. [31][32][33][34] It also generates another sampling trigger (K-trigger) at an equal wavelength interval. Figure 8 shows the optical output power as a function of injection current, measured at the peak power wavelength (1065 nm).…”

Section: Wavelength-tunable Vcsel Structuresmentioning

confidence: 99%

MEMS-VCSEL as a tunable light source for OCT imaging of long working distance

Khan

Keum

Xiao

et al. 2021

J. Optical Microsystems

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We present a wavelength tunable vertical-cavity surface-emitting laser (VCSEL) constructed by die-bonding a half-cavity InGaAs laser diode (LD) chip onto a silicon-on-insulator chip with a microelectromechanical system electrostatic diaphragm mirror that functions as a Fabry-Perot interferometer. As a result of the short cavity length, the integrated tunable LD has single-mode lasing characteristics with an extremely large coherence length of 150 m or more. The developed wavelength tunable LD is used to perform swept-source optical coherence tomography with a large scan depth, which is applicable to ophthalmic observation for the diagnosis of pathologic nearsightedness based on the measurement of the axial length of an eye. © The Authors.Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…The utilization of MEMS mirrors can employ various scanning strategies depending on the selected driving methods. Thanks to the unique beam steering capabilities, MEMS mirrors have been applied to various fields including projection displays [5][6][7], LiDAR systems [8][9][10], inspection tools like bio-imaging applications [11][12], laser material processing [13], and quantum technologies (Fig. 3) [14].…”

Section: Introductionmentioning

confidence: 99%

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Hwang,

Yarar,

Wysocki

et al. 2024

MOEMS and Miniaturized Systems XXIII

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This paper presents the feasibility of implementing various scan patterns, ranging from quasi-static to resonant driving methods, using newly developed 3D-constructed Al(Sc)N piezoelectric MEMS mirrors. A description of the assembled device and how each driving method was tried and characterized are also provided. According to the quasi-static driving test result, tilting angle of ±10° was achieved by both AlN and AlScN based-MEMS mirrors. For 1D resonant scanning, total optical scan angle (TOSA) of 20° was obtained under the low applied voltage of 1.5 Vpp. Further investigations were conducted on various 2D scan patterns, including Lissajous and circular scans. The characterization results show that Lissajous scan patterns with various field-of-view (FOV) sizes can be realized by adjusting the applied voltage and driving frequencies. In the case of circular scan, a TOSA of 10° was achieved, demonstrating the potential for 360° of omnidirectional scanning using the presented mirror devices. In addition, assessments of the electrical stability of fabricated piezoelectric material under high voltage and the mechanical robustness based on long-term cycling tests were conducted to ensure the reliability of the device. The presented low-power compact Al(Sc)N-based piezoelectric MEMS mirror device possesses a wide range of specifications, affording it the capability for application and customization to meet various purposes, while also holding significant potential for further advancements in its utility.

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MEMS Scanning Mirrors for Optical Coherence Tomography

Cited by 25 publications

References 67 publications

Geometrically accurate real-time volumetric visualization of the middle ear using optical coherence tomography

Geometrically accurate real-time volumetric visualization of the middle ear using optical coherence tomography

MEMS-VCSEL as a tunable light source for OCT imaging of long working distance

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

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