2021
DOI: 10.1117/1.jom.1.3.034503
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MEMS-VCSEL as a tunable light source for OCT imaging of long working distance

Abstract: We present a wavelength tunable vertical-cavity surface-emitting laser (VCSEL) constructed by die-bonding a half-cavity InGaAs laser diode (LD) chip onto a silicon-on-insulator chip with a microelectromechanical system electrostatic diaphragm mirror that functions as a Fabry-Perot interferometer. As a result of the short cavity length, the integrated tunable LD has single-mode lasing characteristics with an extremely large coherence length of 150 m or more. The developed wavelength tunable LD is used to perfor… Show more

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Cited by 7 publications
(1 citation statement)
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“…With proper tuning linearization, MEMS-VCSELS are applied for medical imaging via OCT or for long-distance measurement via FMCW LiDAR 15 .…”
Section: Introductionmentioning
confidence: 99%
“…With proper tuning linearization, MEMS-VCSELS are applied for medical imaging via OCT or for long-distance measurement via FMCW LiDAR 15 .…”
Section: Introductionmentioning
confidence: 99%