MEMS Resonators for Frequency Reference and Timing Applications

Wu, Guoqiang; Xu, Jinghui; Ng, Eldwin J.; Chen, Wen

doi:10.1109/jmems.2020.3020787

Cited by 88 publications

(38 citation statements)

References 210 publications

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“…Micro-electro-mechanical system (MEMS) resonators with small occupation, IC compatibility, and lower power consumption have emerged as a key enabling solution to constitute advanced RF-front transceivers for future wireless communications [ 1 , 2 , 3 , 4 , 5 ]. The bulk acoustic wave (BAW) resonators are extremely attractive for their high stiffness and low energy dissipation [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

Chen

Jia

Liu

et al. 2020

Sensors

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This work investigates the dominant energy dissipations of the multi-frequency whispering gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the devices. An extensive theory for each loss source was established and experimentally testified. The squeezed film damping (SFD) is a major loss for all the WGMs at atmosphere, which is distinguished from traditional bulk acoustic wave (BAW) resonators where the high-order modes suffer less from the air damping. In vacuum, the SFD is negligible, and the frequency-dependent Akhiezer damping (AKE) has significant effects on different order modes. For low-order WGMs, the AKE is limited, and the anchor loss behaves as the dominant loss. For high-order modes with an extended nodal region, the anchor loss is reduced, and the AKE determines the Q values. Substantial Q enhancements over four times and an excellent f × Q product up to 6.36 × 1013 at 7 K were achieved.

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Section: Introductionmentioning

confidence: 99%

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

Chen

Jia

Liu

et al. 2020

Sensors

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“…T EMPERATURE stability is one of the most crucial performance specifications for mechanical resonator-based oscillators in frequency reference and timing applications [1]. Quartz crystal oscillators have dominated the overall timing market since their development in as early as the 1920s, due to their excellent temperature stability, low impedance and high quality factor (Q).…”

Section: Introductionmentioning

confidence: 99%

“…On the other hand, quartz crystal oscillators suffer from bulk size, poor reliability, sensitive to external environmental noises, and not compatible with semiconductor batch processes. In recent years, microelectromechanical system (MEMS) resonator-based oscillators have been under intensive research and show good potential as a viable replacement for quartz crystal oscillators in frequency and timing applications [1]- [4].…”

Section: Introductionmentioning

confidence: 99%

“…With the aid of a high accurate temperature sensor cooperated with a fractional-N phase-locked loop (PLL) to compensate for the resonator's frequency variations over temperature, MEMS oscillators have demonstrated ultra-high temperature stability compared to these existing quartz crystal counterparts [5]. However, MEMS resonators alone (without the use of active temperature compensation) typically suffer from large frequency variations over temperature, which hinders them for drop-in replacements of quartz crystals [1], [3]. Although passive compensation approaches, such as composite structure [6], [7], heavy doping [8]- [11], and geometry engineering [12], have been adopted to enhance the temperature stability of MEMS resonators, the improved temperature stability is far from satisfactory for most real world applications, especially in temperature compensated crystal oscillators (TCXOs).…”

Section: Introductionmentioning

confidence: 99%

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A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals

Wen

Jia

Xiao

et al. 2021

IEEE Electron Device Lett.

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“…Quartz crystal resonators (QCR), which have the advantages of a stable frequency, relatively large bandwidth and a high quality factor, are among the key frequency electronic components in the modern information industry and have been widely used in various pieces of communications and electronic equipment [ 1 , 2 ]. The basic requirement for a QCR is to have a stable (aging < 10 −2 ppm/day) and accurate (<5 ppm, 25 °C) frequency.…”

Section: Introductionmentioning

confidence: 99%

Research on Trimming Frequency-Increasing Technology for Quartz Crystal Resonator Using Laser Etching

et al. 2021

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A quartz crystal resonator (QCR) is an indispensable electronic component in the field of the modern electronics industry. By designing and depositing electrodes of different shapes and thicknesses on a quartz wafer with a certain fundamental frequency, the desired target frequency can be obtained. Affected by factors such as the deposition equipment, mask, wafer size and placement position, it is difficult to accurately obtain the target frequency at a given time, especially for mass-produced QCRs. In this work, a laser with a wavelength of 532 nm was used to thin the electrodes of a QCR with a fundamental frequency of 10 MHz. The electrode surface was etched through a preset processing pattern to form a processing method of local thinning of the electrode surface. At the same time, the effect of laser etching on silicon dioxide and resonator performance was analyzed. Satisfactory trimming frequency-increasing results were achieved, such as a frequency modulation accuracy of 1 ppm, frequency distribution with good consistency and equivalent parameters with small changes, by the laser partial etching of the resonator electrode. However, when the surface electrode was etched into using through-holes, the attenuation amplitude of the equivalent parameter became larger, especially in terms of the quality factor (Q), which decreased from 63 K to 1 K, and some resonators which had a serious frequency drift of >40%. In this case, a certain number of QCRs were no longer excited to vibrate, which was due to the disappearance of the piezoelectric effect caused by the local thermal phase change in the quartz wafer.

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MEMS Resonators for Frequency Reference and Timing Applications

Cited by 88 publications

References 210 publications

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals

Research on Trimming Frequency-Increasing Technology for Quartz Crystal Resonator Using Laser Etching

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