2021
DOI: 10.3390/mi12080894
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Research on Trimming Frequency-Increasing Technology for Quartz Crystal Resonator Using Laser Etching

Abstract: A quartz crystal resonator (QCR) is an indispensable electronic component in the field of the modern electronics industry. By designing and depositing electrodes of different shapes and thicknesses on a quartz wafer with a certain fundamental frequency, the desired target frequency can be obtained. Affected by factors such as the deposition equipment, mask, wafer size and placement position, it is difficult to accurately obtain the target frequency at a given time, especially for mass-produced QCRs. In this wo… Show more

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Cited by 3 publications
(2 citation statements)
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“…When the mass of the silver layer is increased, the resonant frequency of the MCR decreases. When the mass of the silver layer is reduced, the resonant frequency of the MCR increases [4]. The laser processing system for MCR frequency modulation mainly includes the MCR carrier module, the frequency detection module and the laser processing module.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…When the mass of the silver layer is increased, the resonant frequency of the MCR decreases. When the mass of the silver layer is reduced, the resonant frequency of the MCR increases [4]. The laser processing system for MCR frequency modulation mainly includes the MCR carrier module, the frequency detection module and the laser processing module.…”
Section: Introductionmentioning
confidence: 99%
“…According to the difference between the actual frequency and the target frequency of the MCR, the frequency of the MCR is adjusted by the laser processing module. A laser with a wavelength of 532 nm is used to thin the electrodes of the MCR with a fundamental frequency of 10 MHz [4]. Laser irradiates the surface of the MCR to vaporize the silver layer.…”
Section: Introductionmentioning
confidence: 99%