MEMS milliactuator for hard-disk-drive tracking servo

Hirano, T.; Fan, Long-Sheng; Gao, Jun; Lee, W.Y.

doi:10.1109/84.679336

Cited by 38 publications

(33 citation statements)

References 8 publications

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“…It is shown that if the potential of active materials could be realized for MEMS applications if better control over the properties of thin films could be achieved during micro fabrication [18]. MEMS milli-actuator for hard-diskdrive tracking servo is exemplified [29].…”

Section: A Actuators and Headsmentioning

confidence: 99%

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

Pathak¹,

Ahmed²,

Joshi

2009

2009 Innovative Technologies in Intelligent Systems and Industrial Applications

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Abstract-We have demonstrated the impact of developments in nanotechnology to Hard Disk Drive (HDD) technology. We have put forth a proposition to enhance the modeling of future storage devices based on innovations in the field of Nanotechnology and MEMS. We have elucidated the influence of recent advances of Nano-Composites, MEMS (Micro Electro Mechanical Systems) etc. and their implications towards the development of storage devices in the future. We have discussed about reliability modeling, nano-physics modeling and thin-film polymer modeling of HDD technology on computer-aided engineering tools such as MATLAB. We have also devised a design of Nanotechnology and MEMS enabled future HDD. We have given a small model for array based MEMS cantilevers for HDD and have used SUGAR MEMS simulation library in MATLAB to model it. We have included the parameters to be kept in mind while modeling a HDD in light of the innovations in Nanotechnology and MEMS. Finally we have stated the working of a MEMS-based actuator and presented its reliability modeling.

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Section: A Actuators and Headsmentioning

confidence: 99%

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

Pathak¹,

Ahmed²,

Joshi

2009

2009 Innovative Technologies in Intelligent Systems and Industrial Applications

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“…In response, focus has been on the micropositioners and micro XY stage. Several studies have been reported on electrostatic actuators for pick-up head of hard-disk drive (Hirano et al 1998), electrostatic actuators (Kim et al 2003) and magnetic actuators (Rothuizen et al 2002) for scanning probe type high-density data storage device, electrostatic actuators for 2D movable microlenses for 3D optical switch applications (Toshiyoshi et al 2003), and electrothermal V-beam type actuators for 2D positioner (Chu and Gianchandani 1996) and XY stage . The general requirements of microactuators for aforementioned applications are large force output, large static displacement, and small driving voltage.…”

Section: Introductionmentioning

confidence: 99%

Development of X-beam electrothermal actuators

Lee¹,

Yeh

2005

Microsyst Technol

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A new electrothermal actuator with X-shaped single crystal silicon beam structure is proposed and characterized. This new actuator is made by using SOI-DRIE processes. X-beam actuator of 2000 lm projection length and 0.5°tilted angle can generate 90 lm static displacement. This new design shows a better static displacement and stability in long travel range than the other actuators. From these experimental data, we conclude the feasibility of our new X-beam actuators. Any movable structure connected with one side of this X-beam can be pushed toward the other side. Therefore, it can be a basic actuation element in association with various structures for different applications.

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“…This type of microactuator can produce large displacement but its resonant frequency is low. Second, the microactuator is mounted between the flexure and the slider (Hirano et al 1998;Horsley et al 1999). This type of microactuator has higher resonant frequency but it requires more disk spacing and additional assembly cost.…”

Section: Introductionmentioning

confidence: 99%

Integrated fabrication of electrostatic microactuator for HDD R/W head positioning

2005

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We designed an electrostatic actuator which can work with the voice coil motor in a dual-stage servo control system to accurately position the read/write (R/ W) head in hard disk drives. An integrated fabrication process for this microactuator has been proposed, considering total fabrication of R/W head and aluminatitanium carbide (AlTiC) slider. Adhesive bonding technique using photoresist SU-8 was selected for wafer bonding between silicon and AlTiC. A microactuator prototype has been fabricated by the proposed process. The stroke of the microactuator has been measured during the static testing.

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MEMS milliactuator for hard-disk-drive tracking servo

Cited by 38 publications

References 8 publications

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

Development of X-beam electrothermal actuators

Integrated fabrication of electrostatic microactuator for HDD R/W head positioning

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