We designed an electrostatic actuator which can work with the voice coil motor in a dual-stage servo control system to accurately position the read/write (R/ W) head in hard disk drives. An integrated fabrication process for this microactuator has been proposed, considering total fabrication of R/W head and aluminatitanium carbide (AlTiC) slider. Adhesive bonding technique using photoresist SU-8 was selected for wafer bonding between silicon and AlTiC. A microactuator prototype has been fabricated by the proposed process. The stroke of the microactuator has been measured during the static testing.
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