MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

Bu, Feng; Xu, Dacheng; Zhao, Heming; Fan, Bo; Cheng, Mengmeng

doi:10.3390/s18093001

Cited by 15 publications

(8 citation statements)

References 25 publications

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“…where  is the precession angular rate and F  is the angledependent control force that is applied to the precession angular-rate control loop. The precession angular-rate bias terms caused by anisodamping and anisostiffness are described in (9). It can be seen that the bias terms result in some problems, such as a threshold and ADB.…”

Section: B Control Algorithmmentioning

confidence: 99%

“…Moreover, anisostiffness and anisodamping are the main reasons for the angle-dependent bias (ADB) of RIG. The quadrature error [6] and frequency splitting can be reduced by quadrature electrostatic tuning and frequency electrostatic tuning [7][8] [9], but they cannot be completely eliminated. Thus, the residual quadrature error and frequency splitting will still have an impact on the performance of RIG.…”

Section: Introductionmentioning

confidence: 99%

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A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

et al. 2020

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The structural asymmetry of the MEMS rate-integrating gyro (RIG) mode produces a threshold and an angle-dependent bias (ADB) that cause gyroscopes operating in this mode to stop working at input rates below the threshold and degrade the linearity of the output angle. This defect in the RIG output angle is actually caused by a precession angular-rate bias that results from both damping asymmetry (anisodamping) and stiffness asymmetry (anisostiffness). This paper describes a novel compensation method based on Fourier series fitting combined with a multiple iteration technique. The proposed compensation method can significantly reduce both the input rate threshold and ADB. Simulations indicate that the threshold and ADB caused by anisodamping and anisostiffness can be reduced by three orders of magnitude. An experimental application of this method produced a MEMS RIG threshold as low as 0.05° per second, representing an improvement of two orders of magnitude and lower than has previously been reported. INDEX TERMS MEMS rate-integrating gyro, Asymmetric damping, Asymmetric stiffness, Threshold.

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Section: B Control Algorithmmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

et al. 2020

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“…Therefore, the lever, frame and proof mass are simplified to inelastic mass and beam to massless spring. It is worth mention here that the lumped-parameter model used in this study is based on linear elastic material behavior, which is very widely used in the research of TFG [6,14,21,33,34,35]. Furthermore, the nonlinear analysis of the overall structure will be discussed in detail later.…”

Section: Theoretical Analysismentioning

confidence: 99%

“…It is difficult to completely match the resonant frequencies of the two modes through structural design due to fabrication imperfections. Therefore, mode matching through electrostatic tuning is often adopted [14,15,16,17,18]. Minimizing substrate energy dissipation and vacuum packaging can improve sensitivity owing to a high quality factor [19,20,21,22].…”

Section: Introductionmentioning

confidence: 99%

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Gao

Jin

et al. 2019

Sensors

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This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity.

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“…However, in practical applications, the frequency split of the vibratory mode changes with changes in environmental parameters [29]. Therefore, such one-time matching methods are not enough.A real-time mode-matching method without affecting normal angular rate detection is urgently needed [30][31][32][33][34]. A mode-matching force balance control method for a MEMS vibrating gyroscope was proposed in [31], making the frequency split 20 mHz during modal matching.…”

mentioning

confidence: 99%

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

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An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 • /h to 2.8331 • /h, and the Angle Random Walk (ARW) decreases from 1.0208 • / √ h to 0.0524 • / √ h. Compared with the mode mismatch condition, the ARW is improved by 19.48 times.Micromachines 2020, 11, 210 2 of 22 Therefore, the mode-matching technology improves the bias stability and mechanical sensitivity of MEMS gyroscopes by eliminating the frequency split between the driving mode and the sensing mode, which has attracted significant attention from researchers [19][20][21]. Furthermore, some frequency modification techniques are proposed. Laser finishing, ion beam milling, and selective deposition mass loading reduce frequency split [22,23]. However, these methods are often used to change the dynamic characteristics of the sensor permanently, and this type of tuning is inflexible and time-consuming. The tuning control is limited and can only be achieved offline.Electrostatic tuning is usually used for mode-matching, which can provide more flexibility and real-time realization [24][25][26][27][28][29]. The mode-matching process based on phase-locked loop (PLL) takes advantage of the phase delay of 90 • between the quadrature input and output of the sensing mode. This feature is used in [27] to achieve mode-matching and to adjust the tuning voltage using PLL technology. The amplitude-frequency characteristic refers to the maximum amplitude of the quadrature response signal during mode-matching [28]. However, in these methods, the signal from the Coriolis demodulation channel is used to control the frequency tuning voltage. Therefore, the angular velocity can only be measured if the tuning voltage is fixed, and the matching loop is disconnected after mode-matching. Thus, these methods cannot achieve real-time mode-matching. However, in practical applications, the frequency split of the vibratory mode changes with changes in environmental parameters [29]. Therefore, such one-time matching methods a...

show abstract

MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

Cited by 15 publications

References 25 publications

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

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