A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

Liu, Jing; Yang, Yiren; Guo, Shuwen; Fan, Bo; Xuan, Lin; Bu, Feng; Xu, Dacheng

doi:10.1109/access.2020.3014661

Cited by 7 publications

(5 citation statements)

References 21 publications

(25 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…8 describes a rate threshold test for HDRG, showing both the angle and rate outputs under the sequential rate inputs of 0 • /s, −0.0001 • /s, 0 • /s and 0.0001 • /s in a time interval of 60s. Although the rate outputs of HDRG has a standard deviation of about 0.000215 • /s, the angle outputs of HDRG demonstrate a clear response to these rate The performances of the MEMS RIGs published in recent literatures [3], [7], [9], [10], [13], [14] are provided in Table I for comparison. The data evidently indicate that the HDRG exhibits the best performance in rate integrating mode.…”

Section: Error Model and Compensation Methodsmentioning

confidence: 99%

A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

Zhang

Shen

Sun

et al. 2021

IEEE Electron Device Lett.

View full text Add to dashboard Cite

This letter presents a high performance rate-integrating honeycomb disk resonator gyroscope (HDRG). High Q factor resonator and symmetric vibration detection gain are the key to high performance rate-integrating gyroscope. By stiffness-mass decoupling design, HDRG can achieve high Q factor of about 600k and decay time of over 44s. A compensation method is applied to suppress the rate-dependent angular drift caused by the asymmetry circular distribution of detection gains. Finally, the rate-integrating HDRG shows an excellent bias instability of 0.038 • /h, 1.05ppm scale factor nonlinearity, wide measurement range of over ±7000 • /s and a threshold value of about ±0.0001 • /s, which is the best performance in the reported rate-integrating MEMS gyroscopes.

show abstract

Section: Error Model and Compensation Methodsmentioning

confidence: 99%

A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

Zhang

Shen

Sun

et al. 2021

IEEE Electron Device Lett.

View full text Add to dashboard Cite

show abstract

“…A significant number of papers are devoted to mathematical modeling of the dynamics of Coriolis MEMS gyroscopes with a ring resonator [20][21][22][23][24][25][26][27]. The development of algorithms for generation and control of oscillations of such systems is an active reseach area [20,[28][29][30][31][32][33][34][35]. The papers [36][37][38] address the issues of parametric excitation and maintenance of MEMS resonator oscillations taking into account nonlinear factors.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Dynamics of a Microscale Rate Integrating Gyroscope with a Disk Resonator under Parametric Excitation

Indeitsev¹,

Zavorotneva²,

Lukin³

et al. 2023

Nelin. Dinam.

View full text Add to dashboard Cite

This article presents an analytical study of the dynamics of a micromechanical integrating gyroscope with a disk resonator. A discrete dynamic model of the resonator is obtained, taking into account the axial anisotropy of its mass and stiffness properties, as well as the action of the electrical control system of oscillations. An analysis of the spectral problem of disk vibrations in the plane is carried out. The nonlinear dynamics of the resonator in the regimes of free and parametrically excited vibrations are investigated. In the mode of parametric oscillations, qualitative dependencies of the gyroscopic drift on the operating voltage, angular velocity and parameters of defects are obtained.

show abstract

“…Furthermore, the error parameters of MEMS spiderweb gyroscopes are identified in ref. 22 using Fourier fitting technology and multiple iterations, resulting in the successful achievement of compensation thresholds as low as 0.05 °/s. Lastly, a novel damping-matching methodology for controlling the quality factor of MEMS DRGs by leveraging thermoelastic energy dissipation effects is explored in ref.…”

Section: Introductionmentioning

confidence: 99%

An automatic damping-matching method for eliminating 87.64% damping asymmetry of MEMS vibratory gyroscope in rate mode

Zhou,

Ren,

Zhou

et al. 2023

Preprint

View full text Add to dashboard Cite

The damping asymmetry error is a prominent factor influencing the static performance of fully symmetrical Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes. To eliminate this error and enhance the gyroscope's static performance, this paper introduces a method for real-time identification and automatic matching of the damping asymmetry error in rate mode. By leveraging the vibration characteristics of the fully symmetrical MEMS vibratory gyroscope in rate mode, dedicated online test methods are devised to determine the quality factors for both the drive and sense modes, enabling online identification of the damping asymmetry error. Furthermore, an automatic damping-matching system is devised utilizing the mechanical-thermal dissipation mechanism of a resistive damper. The effectiveness of this proposed method is validated through simulations and experiments conducted on a MEMS disk resonator gyroscope (DRG). The experimental results show an accuracy within 4% for quality factor identification, while automatic damping matching effectively reduces the damping asymmetry error by 87.64%. Employing this automatic damping-matching method successfully diminishes the zero-input bias caused by damping asymmetry error in the MEMS DRG from 0.1067°/s to 0.0249°/s and improves bias instability from 0.3985°/s to 0.1878°/s.

show abstract

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

Cited by 7 publications

References 21 publications

A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

Nonlinear Dynamics of a Microscale Rate Integrating Gyroscope with a Disk Resonator under Parametric Excitation

An automatic damping-matching method for eliminating 87.64% damping asymmetry of MEMS vibratory gyroscope in rate mode

Contact Info

Product

Resources

About