MEMS for Plasmon Control of Optical Metamaterials

Abstract

Metamaterials have attracted a great deal of attention as artificial electromagnetic materials having unique optical characteristics, and various innovative optical applications have been expected. Micro electromechanical systems (MEMS)-based reconfigurable metamaterials are candidate technologies for active optical control. In this paper, we focus on MEMS-based reconfigurable metamaterials operated in the optical region between visible and near-infrared wavelengths. A brief overview of static optical metamaterials and active optical metamaterials driven by MEMS actuators is presented. Moreover, points to be considered for a micromachining process of optical metamaterials are discussed with results of calculations.

Interconnections between Electronic Structure and Optical Properties of Multilayer Nanolaminate TiAlN/Ag and Al2O3/Ag Coatings

“…The energy (or resonance frequency) and width of the selective adsorption range of the electromagnetic radiation are correlating with the energy band of the plasmon resonance in the planar metamaterial. According to Equations (1) and (6), this correlation is a complex one.…”

“…The physical paradox is that the confinement in nanostructured materials opens new possibilities. Multiple interesting properties, such as invisible negative refraction and artificial magnetism, will provide a broader space for exploring novel optical devices based on plasmonic metamaterials [3], cloaking devices [4], superlenses [5], microelectromechanical systems (MEMS) [6], and solar cells [7,8], which are all candidate applications of metamaterials. Solar energy is a very promising field of application of thin-film planar MIMs.…”

Fabrication of refractive index sensors using polarization independent metamaterial and their application to chemical concentration measurement and DNA detection

“…Metamaterials are artificial optical materials with a subwavelength structure smaller than incident wavelength; a number of devices were proposed using novel optical phenomena offered by such materials, for example, negative refractive index, cloaking, luminescence enhancement, ultrathin lenses, perfect absorbers, wavelength‐selective filters, etc . Metamaterials are also known to excite localized surface plasmons and to show high sensitivity to changes in ambient refractive index .…”

Fabrication of Refractive Index Sensors using Polarization Independent Metamaterial and Their Application to Chemical Concentration Measurement and DNA Detection

“…Metamaterials are artificial optical materials with a subwavelength structure smaller than incident wavelength; a number of devices were proposed using novel optical phenomena offered by such materials, for example, negative refractive index, cloaking, luminescence enhancement, ultrathin lenses, perfect absorbers, wavelength-selective filters, etc. [11][12][13][14][15][16][17][18][19][20][21][22] Metamaterials are also known to excite localized surface plasmons and to show high sensitivity to changes in ambient refractive index. [6][7][8][9][10] In addition, high freedom of shape design allows to optimize mode distribution of localized surface plasmons, and to realize high-performance refractive index sensors superior to conventional devices using Au colloids.…”