MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing

Abstract

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

On-fiber plasmonic interferometer for multi-parameter sensing

“…Therefore, sensor designs that can distinguish different parameters in a single measurement are highly desirable. Over the last decade, a number of multi-parameter fiberoptic sensors have been presented [11][12][13][14][15][16][17][18]. There are generally two methods.…”

Multiple Modes of a Photonic Crystal Cavity on a Fiber Tip for Multiple Parameter Sensing

“…For this reason, a considerable effort has been reported to develop fiber-optic sensors capable of measuring multiple parameters simultaneously, thus avoiding the need for a second sensor. Typical examples are the measurements of pressure and temperature [14], strain and temperature [15], and, particularly, refractive index (n) and temperature (T). The latter combination of n and T has attracted a large amount of interest in recent years, nearly exclusively based on clever combinations of one or more established fiber-optic methods for measuring n and T. [36], or other [37].…”

Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer

“…Examples of which include waveguide coupling [1,2], optical pumping [3,4] and fabrication of micromechanical sensor systems [5,6]. Adhesion is usually achieved through use of glues such as epoxy [7], a fusion splice [8] or glass frit [9], which do exhibit limitations.…”