MEMS Cost Analysis

Lawes, Ron A.

doi:10.1201/b15635

Cited by 5 publications

(2 citation statements)

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“…On the contrary, when the goal is to manufacture small batches of highly customized devices, the initial investment for starting a classical production can be high. 17 Flexible and scalable techniques like 3D printing can in this case provide alternative fabrication routes for specialized small productions of MEMS. The possibility of 3D printing functional microdevices has already been demonstrated by some research groups.…”

Section: D Printingmentioning

confidence: 99%

Electroless Metallization of Stereolithographic Photocurable Resins for 3D Printing of Functional Microdevices

Bernasconi

Credi

Tironi

et al. 2017

J. Electrochem. Soc.

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In the present paper the electroless metallization of 3D printed devices using stereolithography is investigated. Two different photocurable resins from a commercial supplier and a self-formulated one are used as starting materials for printing. A first metal layer of NiP or Cu, obtained by an optimized pretreatment and plating process, is subsequently applied on the parts. The possibility of obtaining multilayers through the successive electrodeposition of different metals on the electroless treated parts is demonstrated as well. From the applicative point of view, the use of 3D printing, coupled with electroless deposition of mono or multilayers, can be employed to manufacture functional microstructures for use in the fields of microrobotics, MEMS, metamaterials and others. For this reason, the realization of a prototypical magnetic actuator is presented as an example of possible application. 3D printing1 has recently acquired great relevance for research and industrial applications due to its advantages with respect to traditional manufacturing techniques: the opportunity to create geometries impossible to obtain with other techniques, low cost and great scalability. This technique has been applied in the past for both rapid prototyping and production of custom-made parts.2,3 In recent years, thanks to the introduction of techniques able to operate at the microscale, new possibilities have been individuated in fields like microrobotics, MEMS or metamaterials fabrication. Many 3D printing techniques are available, such as stereolithography (SLA), 4 Selective Laser Sintering (SLS), 5 Fused Deposition Modelling (FDM) 6 or Two Photon Lithography (2PL). 7 Techniques like SLA or 2PL present however significant advantages compared to FDM or SLS when the production of micrometric parts is required. In particular, the products are characterized by an improved surface finish and by the possibility to achieve great resolution; 8 dimensional tolerances are better than FDM or SLS printing. These important properties allow thinking to applications like the direct printing of microstructures that typically present characteristic dimensions in the order of μm, like MEMS or others.All 3D printing techniques able to operate at the microscale are however characterized by the same problem: metal parts are considerably hard to obtain. The materials used in 3D printing are mainly polymers and only some techniques are suitable for direct metal forming, like SLS.5 A possible solution to obtain a metallic finish on a printed object is to metallize only the surface of the resin. This makes possible to obtain some properties of metals without having a bulk metallic object. 9 In particular it can be convenient to use electroless plating, 10 a method able to provide thick and uniform metal layers on non-conductive substrates, such as the resins used in the printing step. By examining the existing scientific literature, it is evident that typical polymers used in FDM printing, such as PET, 11 ABS, 12 PLA and PETG 13 can be easily metalli...

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Section: D Printingmentioning

confidence: 99%

Electroless Metallization of Stereolithographic Photocurable Resins for 3D Printing of Functional Microdevices

Bernasconi

Credi

Tironi

et al. 2017

J. Electrochem. Soc.

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“…Bulk wave modulators avoid the artifacts of pixelated modulators because they are analog devices without fixed pixel structure; 7 however, they are expensive to fabricate as they do not lend themselves to wafer-based batch fabrication processes. 8 Leaky-mode modulators are similar to Bragg cells in that they are analog devices, so they also avoid pixel artifacts. Additionally, leaky-mode modulators are readily fabricated using straightforward wafer-based photolithographic processes, which makes it possible to fabricate them inexpensively.…”

Section: Introductionmentioning

confidence: 99%

Progress on characterization and optimization of leaky-mode modulators for holographic video

Smalley

McLaughlin

Leach

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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Abstract. We give a summary of the progress we have made in the fabrication of guided wave devices for use in holographic video displays. This progress includes identifying anisotropic leaky-mode modulators as a platform for holographic display, the development of a characterization apparatus to extract key parameters from leaky-mode devices, and the identification of optimized waveguide parameters for frequency-controlled color display.

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Application of finite element models for design of high-precision MEMS pressure sensors

Gridchin

Chebanov

Zinov'ev³

et al. 2014

2014 12th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE)

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MEMS Cost Analysis

Cited by 5 publications

References 0 publications

Electroless Metallization of Stereolithographic Photocurable Resins for 3D Printing of Functional Microdevices

Electroless Metallization of Stereolithographic Photocurable Resins for 3D Printing of Functional Microdevices

Progress on characterization and optimization of leaky-mode modulators for holographic video

Application of finite element models for design of high-precision MEMS pressure sensors

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