MEMS Capacitive Force Sensor for Use in Microassembly

Chu, Henry K.; Mills, James K.; Cleghorn, W.L.

doi:10.1109/aim.2008.4601762

Cited by 10 publications

(6 citation statements)

References 12 publications

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“…Several innovations have been made in recent years to facilitate haptic feedback in micromanipulation, including piezoresistive strain gauges [9]- [12] and optical Fiber Bragg Grating (FBG) sensors [13] for tool-tip force measurement in microsurgery devices, piezoelectric polyvinylidine-floride (PVDF) films [14] and MEMS-based capacitive sensor arrays [15], [16] for tactile sensing in robotic micromanipulation, and monolithic MEMS-based force-sensing manipulators [17], [18]. All of these innovations enable precise force measurement or contact localization suitable for micromanipulation, but several of them also entail problems with fabrication cost, mechanical robustness, signal fidelity and temporal hysteresis, packaging and assembly limitations, and a lack of functional versatility that make them unfit for general-purpose micromanipulation.…”

Section: Introductionmentioning

confidence: 99%

Soft Tactile Sensor Arrays for Force Feedback in Micromanipulation

Hammond¹,

Kramer

Wan³

et al. 2014

IEEE Sensors J.

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This paper describes the design, fabrication, and experimental validation of a soft tactile sensor array for submillimeter contact localization and contact force measurement in micromanipulation. The geometry and placement of conductive liquid microchannels embedded within the elastic sensor body are optimized to provide high sensitivity for representative micromanipulation tasks and to overcome functional limitations seen in previous soft tactile sensor research. Mechanical testing of the numerically optimized sensor prototype demonstrates sensitivity to normal contact forces of <50 mN and submillimeter contact localization resolution. Tactile sensing experiments demonstrate the ability to infer the abstract geometries and motions of objects imparting force on the sensor surface by analyzing microchannel deformation patterns.

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Section: Introductionmentioning

confidence: 99%

Soft Tactile Sensor Arrays for Force Feedback in Micromanipulation

Hammond¹,

Kramer

Wan³

et al. 2014

IEEE Sensors J.

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“…At the micro-nanoscale, mechanical measurements are often conducted using transducers based on microelectromechanical systems (MEMS), such as capacitive force sensors and piezoresistive cantilevers [19][20][21][22][23]. Compared to other cellular force measurement techniques, such as optical and magnetic tweezers [24,25], atomic force microscopy (AFM) [26,27], magnetic bead measurement [28] and micropipette aspiration [29], MEMS force sensors are more cost-effective and provide greater flexibility for system integration.…”

Section: Introductionmentioning

confidence: 99%

A micropillar-based on-chip system for continuous force measurement ofC. elegans

Ghanbari

Nock

Johari

et al. 2012

J. Micromech. Microeng.

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Caenorhabditis elegans is a well-established model organism and has been gaining interest particularly related to worm locomotion and the investigation of the relationship between muscle arms and the motion pattern of the nematode. In this paper, we report on a micropillar-based on-chip system which is capable of quantifying multi-point locomotive forces of a moving C. elegans. A Polydimethylsiloxane (PDMS) device was microfabricated to allow C. elegans to move in a matrix of micropillars in a channel, and an image processing method was developed to resolve the worm force from the bending pillars. The current micropillar-based system is able to measure force with a resolution of 2.07 μN for body width of 80 μm. Initial experiments have been conducted to collect a maximum force level for thirteen wild type worm samples. A maximum force level of 61.94 μN was observed from 1571 data points, based on which an average maximum force level was 32.61 μN for multi-point measurements. The demonstrated capabilities of the system can be an enabling technology that allows biologist to gain a better understanding of subtle force patterns of C. elegans and worm muscle development.

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“…The method measured applied forces parallel and perpendicular to the wafer surface and provided nano-Newton sensitivity. 3 Chu et al 4 designed a capacitive force sensor with an integrated displacement reduction mechanism that provided milli-Newton sensitivity. However, these methods are intrusive and expensive.…”

Section: Introductionmentioning

confidence: 99%

Vision-based force measurement using geometric moment invariants

Wang

Chun

et al. 2012

Proceedings of the Institution of Mechanical Engineers, Part C:

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This article presents a new vision-based force measurement method to measure microassembly forces without directly computing the deformation. The shape descriptor of geometric moment invariants is used as a feature vector to describe the implicit relationship between an applied force and the deformation. Then, a standard library is established to map the corresponding relationship between the deformed cantilever under known forces and a set of feature vectors. Finally, a support vector machine compares the feature vector of deformed cantilever under an unknown force with those in the standard library, implements multi-class classification and predicts the unknown force. The vision-based force measurement method is validated for eight simulated microcantilevers of different sizes. Both regional and boundary moment invariants are used to constitute the feature vector. Simulated results show that the force measurement precision varies with length, width and height of cantilevers. If length increases and width and height decrease, the precision is higher. This trend can provide a reference for mechanism design of microcantilevers and microgrippers.

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MEMS Capacitive Force Sensor for Use in Microassembly

Cited by 10 publications

References 12 publications

Soft Tactile Sensor Arrays for Force Feedback in Micromanipulation

Soft Tactile Sensor Arrays for Force Feedback in Micromanipulation

A micropillar-based on-chip system for continuous force measurement ofC. elegans

Vision-based force measurement using geometric moment invariants

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