MEMS Based Gravimetric Sensor for the Detection of Ultra-Fine Aerosol Particles

Chellasivalingam, Malar; Somappa, Laxmeesha; Boies, Adam M.; Baghini, Maryam Shojaei; Seshia, Ashwin A.

doi:10.1109/sensors47125.2020.9278870

Cited by 3 publications

(3 citation statements)

References 8 publications

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“…However, this project used off-the shelf, low-cost electronic components, such as phase-lock-loop (PLL) integrated circuit (IC), and it demonstrated the real-time sensor output. This is opposed to the results produced using highly accurate test instruments, such as lock-in amplifiers, which show detection limits on the scale of picograms [13,45].…”

Section: Piezoelectric Mass Sensorsmentioning

confidence: 72%

“…Figure 3 presents the microscopic view of the device, showing two cases: (a) a smaller concentration and (b) a larger concentration of adsorbed test particles. A MEMS piezoelectric thin-film resonator was used as an oscillatory mass balance to characterise the mass deposition in the PM measurement system [13]. The device was operated at the resonant mode frequency of 3.1 MHz and Q of 2100, under atmospheric pressure and at room temperature.…”

Section: Piezoelectric Mass Sensorsmentioning

confidence: 99%

“…Currently, a wide range of sensing solutions are being developed to provide detailed and reliable data on key environmental parameters such as particulate matter (PM) [9][10][11][12][13]. Some specific examples of these parameters are PM 2.5 , which refers to PM with particle diameter less than or equal to 2.5 μm, and PM 10 , which refers to PM with particle diameter less than or equal to 10 μm.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

MEMS sensor for detection and measurement of ultra-fine particles

Pachkawade

Tse

2022

Eng. Res. Express

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This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. The fine and ultra-fine particles such as particulate matter (PM), ferrous particles, and nanoparticles are known to contaminate the atmosphere, fluids used in industrial machines, and food, respectively. The physical principles involved in the target particles accumulating on the sensor are presented. Micro-gravimetric resonators that use piezoelectric and thermally actuated transducers for particle detection and concentration measurement in air and high-viscosity liquids are analyzed. Critical sensor features, such as maximum possible parametric sensitivity, the detection limit of particle size and mass concentration, linear dynamic range, and output stability, are thoroughly evaluated.

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Section: Piezoelectric Mass Sensorsmentioning

confidence: 72%

Section: Piezoelectric Mass Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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MEMS sensor for detection and measurement of ultra-fine particles

Pachkawade

Tse

2022

Eng. Res. Express

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Compressed Sensing

Sonkusale

Baghini

Aeron

2022

Flexible Bioelectronics With Power Autonomous Sensing and Data Analytics

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On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation

Azizi

Madinei

Khodaparast

et al. 2023

Int J Mech Mater Des

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This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantilever microbeam at the end of which an electrostatically actuated tip mass is attached. The piezoresistive layers are bonded to the vicinity of the clamped end of the cantilever and the device is set to operate in the resonance regime by means of harmonic electrostatic excitation. The nonlinearities due to curvature, shortening and electrostatic excitation have been considered in the modelling process. It is shown that once the mass is deposited on the tip mass, the system undergoes a cyclic fold bifurcation in the frequency domain, which yields a sudden jump in the output voltage of the piezoresistive layers; this bifurcation is attributed to the nonlinearities governing the dynamics of the response. The partial differential equations of the motion are derived and discretized to give a finite degree of freedom model based on the Galerkin method, and the limit cycles are captured in the frequency domain by using the shooting method. The effect of the orientation of the device with respect to the crystallographic coordinates of the silicon and the effect of the orientation of the piezoresistive layers with respect to the microbeam length on the sensitivity of the device is also investigated. Thanks to the nonlinearity and the orientation adjustment of the device and piezoresistive layers, a twofold sensitivity enhancement due to the added mass was achieved. This achievement is due to the combined amplification of the sensitivity in the vicinity of the bifurcation point, which is attributed to the nonlinearity and maximizing the sensitivity by orientation adjustment of the anisotropic piezoresistive coefficients.

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MEMS Based Gravimetric Sensor for the Detection of Ultra-Fine Aerosol Particles

Cited by 3 publications

References 8 publications

MEMS sensor for detection and measurement of ultra-fine particles

MEMS sensor for detection and measurement of ultra-fine particles

Compressed Sensing

On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation

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