MEMS sensor for detection and measurement of ultra-fine particles

Pachkawade, Vinayak; Tse, Zion Tsz Ho

doi:10.1088/2631-8695/ac743a

Cited by 9 publications

(9 citation statements)

References 74 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Usually, silicon/polysilicon is used to construct such a transducer. In recent years, piezoelectric materials (for example, aluminum nitride (AlN) and quartz) have become a popular choice in realizing several potential applications in BioMEMS [4]. However, materials such as silicon, piezo, etc.…”

Section: Methodsmentioning

confidence: 99%

“…With N/MEMS, it is possible to precisely detect the target analyte and measure its concentration. This is achieved through precisely recording even the minutest shift in the sensor output [4,9,10]. Transduction principles such as piezoelectricity, piezo-resistivity, electro-static, electro-magnetic, electro-thermal, optical, etc.…”

Section: Linearity and Dynamic Rangementioning

confidence: 99%

“…N/MEMS resonators for ultra-precise bio/chemical sensing N/MEMS resonators are one of the most promising candidates to develop a wide range of applications in medical diagnostic and instrumentation [1,4,8,[13][14][15][16]. N/MEMS resonators offer extremely high-quality factors (Q) and high frequency.…”

Section: 3mentioning

confidence: 99%

“…Biosensors are playing a crucial role in today's biomedical science and technology [1]. Biosensors allow the sensitive and precise detection of a range of biological or chemical contaminants [1][2][3][4] [5]. It is a device that measures biological or chemical reactions and generates an output signal in proportion to the concentration of a target analyte in the reaction.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

N/MEMS Biosensors: An Introduction

Pachkawade¹

2023

MEMS and Microfluidics in Healthcare

Self Cite

View full text Add to dashboard Cite

In the 21 st century, biosensors have gathered much wider attention than ever before, irrespective of the technology that promises to bring them forward. With the recent COVID-19 outbreak, the concern and efforts to restore global health and well-being are rising at an unprecedented rate. A requirement to develop precise, fast, point-of-care, reliable, easily disposable/reproducible and low-cost diagnostic tools have ascended. Biosensors form a primary element of hand-held medical kits, tools, products, and/or instruments. They have a very wide range of applications such as nearby environmental checks, detecting the onset of a disease, food quality, drug discovery, medicine dose control, and many more. This chapter explains how Nano/Micro-Electro-Mechanical Systems (N/MEMS) can be enabling technology towards a sustainable, scalable, ultraminiaturized, easy-to-use, energy efficient, and integrated bio/chemical sensing system. This study provides a deeper insight into the fundamentals, recent advances, and potential end applications of N/MEMS sensors and integrated systems to detect and measure the concentration of biological and/or chemical analytes. Transduction principle/s, materials, efficient designs including readout technique, and sensor performance are explained. This is followed by a discussion on how N/MEMS biosensors continue to evolve. The challenges and possible opportunities are also discussed.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Linearity and Dynamic Rangementioning

confidence: 99%

Section: 3mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

N/MEMS Biosensors: An Introduction

Pachkawade¹

2023

MEMS and Microfluidics in Healthcare

Self Cite

View full text Add to dashboard Cite

show abstract

“…In the optical domain, they are used in multiple optical applications, such as sensors and microphones [4][5][6][7][8] . From such diversified spectrum of applications, it has been evident that MEMS are useful candidates in medical, chemical, and biological fields [9][10][11] . Recent developments in MEMS technology, in particular, have completely changed trends in a variety of industries, including sports, aerospace, biomedicine, electronics, home appliances, and automotive [12][13][14][15][16] .…”

Section: Introductionmentioning

confidence: 99%

A Review on Microchannel Fabrication Methods and Applications in Large-Scale and Prospective Industries

Afzal¹,

Tayyaba²,

Ashraf³

et al. 2022

Evergreen

View full text Add to dashboard Cite

Microchannels based on microelectromechanical systems (MEMS) have received a lot of interest in the microfluidics and biomedical fields over the past forty years. While their applications have been multifarious, a comprehensive literature review focusing on their design, type, and applications is not currently present in the literature. Researchers working on these elements of microchannels will gain targeted knowledge from the current review on microchannels. Due to its advanced properties, flexibility of mass, and small size, microdevice demand has been rising quickly, particularly in industrial applications. The classification of microchannels and their uses are the main focus of this work. These include but are not limited to molding, electroplating, lithography, lab-ona-chip, micromolding, micromachining, micromilling, laser ablation, lithography, microcontact printing (µcp), hot embossing, electrochemical micromachining (EMM), and etching. In addition, numerous hybrid techniques for microchannel manufacturing have been reported. So, in essence, this review offers a range of advancements in microchannel manufacturing. The review also attempts to present a qualitative analysis describing the various methodologies associated with microchannels in terms of their design, shape, and flow regimes for applications such as pressure drop and transfer of heat prediction. Additionally, depending on the precise uses needed, a number of materials, including but not limited to ceramics, silicon, metals, and polymers, are utilized in the manufacture of microchannels. On metallic substrates, polymers such as silicon, glass, and polymeric materials are used. The biomedical industry uses polymeric and glass substrates instead of silicon substrates, which are used for mechanical engineering and electronic applications. In addition to outlining methods for choosing the best kind of microchannel, this paper also suggests important directions for the future.

show abstract

Resonant Silicon Microcantilevers for Particle and Gas Sensing

Xu,

Peiner

2023

Piezoelectric Sensors

View full text Add to dashboard Cite

MEMS sensor for detection and measurement of ultra-fine particles

Cited by 9 publications

References 74 publications

N/MEMS Biosensors: An Introduction

N/MEMS Biosensors: An Introduction

A Review on Microchannel Fabrication Methods and Applications in Large-Scale and Prospective Industries

Resonant Silicon Microcantilevers for Particle and Gas Sensing

Contact Info

Product

Resources

About