MEMS based color-VGA micro-projector system

Raboud, D.; Barras, Thierry; Conte, Fabrizio Lo; Fabre, L.; Kilcher, Lucio; Kechana, F.; Abelé, N.; Kayal, Maher

doi:10.1016/j.proeng.2010.09.097

Cited by 17 publications

(14 citation statements)

References 4 publications

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“…The figure of merit defined as the ratio of optical tilt angle to the consumed power is calculated in Table 3, which shows high performance of this micro-mirror. The other listed works do not provide 3-DOF motion 33,34 . The graph of Fig.…”

Section: Discussionmentioning

confidence: 99%

Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Afsharipour

Soltanzadeh

Park

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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A low power three-degree-of-freedom scanning micro-mirror is presented. The 2×2 mm mirror is a gimbaless structure, directly supported by single crystal micro-springs. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third axis. The transient and frequency responses of the micro-mirror are analyzed. The Lagrange's equations of motions, describing the dynamic behavior of the system are presented, and show a good agreement with the experimental results. The fabricated MEMS mirror demonstrated a tilt angle of 22.8º at 247.5 Hz about y-axis, and 13.3º at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20 mA current on the mirror. Power consumption was 2.6 mW of power in tilting motions in resonant operation. With a total dc drive current of 110 mA, 232 µm linear motion was achieved.

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Section: Discussionmentioning

confidence: 99%

Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Afsharipour

Soltanzadeh

Park

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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“…The light consists of three laser colors, red, green and blue (RGB). RGB lasers need to be modulated simultaneously, in order to create the proper color mix for each pixel [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity

Zhou

Wang

et al. 2020

Micromachines

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In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror. For this paper, the piezoresistive sensor was integrated on the torsion beam of the micromirror to monitor the physical position of the micromirror. The feedback signal was used to generate the zero-crossing time, which was used to estimate the physical position of the resonating mirror over time. The estimated position was affected by the zero-crossing time and the error directly influenced the definition of the projected image. By reducing the impurity concentration from 3 × 1018/cm3 to 1 × 1018/cm3 and increasing shear stress on piezoresistive sensor, the sensitivity of the piezoresistive sensor increased from 4.4 mV/V° to 6.4 mV/V° and the error of the image pixel reduced from 1.5 pixels to 0.5 pixels. We demonstrated that the image quality of an Optical-Microeletromechanical Systems (MOEMS) laser projection could be improved by enhancing the sensitivity of the piezoresistive sensor.

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“…With the development of MEMS, laser micro-mirror scanning technology has found wide applications in engineering in recent years [22,23,24,25]. MEMS scanning mirror has been used in optical coherence tomography (OCT) scans [26,27], time of flight (ToF) cameras [28], 3D confocal scanning microscopes [29,30,31] and other fields of measurement [32,33,34], however, there are few reports of its use in 3D measurement. In this work, a novel 3D measurement method, called multiple laser stripe scanning profilometry (MLSSP) based on MEMS scanning mirror projection, is proposed, which can solve the problems presented above.…”

Section: Introductionmentioning

confidence: 99%

Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection

Zhou

Zhang

et al. 2019

Micromachines

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In traditional laser-based 3D measurement technology, the width of the laser stripe is uncontrollable and uneven. In addition, speckle noise in the image and the noise caused by mechanical movement may reduce the accuracy of the scanning results. This work proposes a new multiple laser stripe scanning profilometry (MLSSP) based on microelectromechanical systems (MEMS) scanning mirror which can project high quality movable laser stripe. It can implement full-field scanning in a short time and does not need to move the measured object or camera. Compared with the traditional laser stripe, the brightness, width and position of the new multiple laser stripes projected by MEMS scanning mirror can be controlled by programming. In addition, the new laser strip can generate high-quality images and the noise caused by mechanical movement is completely eliminated. The experimental results show that the speckle noise is less and the light intensity distribution is more even. Furthermore, the number of pictures needed to be captured is significantly reduced to 1/N (N is the number of multiple laser stripes projected by MEMS scanning mirror) and the measurement efficiency is increased by N times, improving the efficiency and accuracy of 3D measurement.

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MEMS based color-VGA micro-projector system

Cited by 17 publications

References 4 publications

Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity

Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection

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