2007
DOI: 10.1063/1.2794006
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Medium resolution off-axis electron holography with millivolt sensitivity

Abstract: Extending the detection limit of dopants for focused ion beam prepared semiconductor specimens examined by off-axis electron holography

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Cited by 73 publications
(33 citation statements)
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“…The number of electrons per pixel in a recorded electron hologram is usually at least 100-500 for an acquisition time of 2-8 sec. If the biprism wire and the specimen are stable enough, then a longer acquisition time can be used (Cooper et al, 2007). Furthermore, if two or more biprisms are used simultaneously, then there is more flexibility to control the overlap width, interference fringe spacing and biprism rotation angle independently, as well as to eliminate Fresnel fringes from the recorded image wave (Harada et al, 2006).…”
Section: Interference Fringe Visibilitymentioning
confidence: 99%
“…The number of electrons per pixel in a recorded electron hologram is usually at least 100-500 for an acquisition time of 2-8 sec. If the biprism wire and the specimen are stable enough, then a longer acquisition time can be used (Cooper et al, 2007). Furthermore, if two or more biprisms are used simultaneously, then there is more flexibility to control the overlap width, interference fringe spacing and biprism rotation angle independently, as well as to eliminate Fresnel fringes from the recorded image wave (Harada et al, 2006).…”
Section: Interference Fringe Visibilitymentioning
confidence: 99%
“…In addition, the phase reconstruction procedure includes a low-pass window function which further deteriorates the reachable phase resolution for a certain spatial resolution [49]. In literature, a decrease of the signal-to-noise ratio (SNR) by roughly one order of magnitude was reported for medium (spatial) resolution holography [50]. The present off-axis holograms show around 2500 counts per pixel (respectively 125 electrons per pixel) and a contrast of 13.8 %.…”
Section: Analysis Of Resolution With Respect To Electronic Characterimentioning
confidence: 97%
“…Although the spatial resolution in this operating mode can in principle be improved to $ 4 nm at the expense of fringe contrast and the number of counts recorded, in this experiment the settings were chosen to optimise the field of view. The mechanical and electrical stability of the Titan allowed individual electron holograms to be acquired for time periods of a minute or more, leading to reconstructed phase images with excellent signal-to-noise ratios [17].…”
Section: Article In Pressmentioning
confidence: 99%