Mechanical properties of Ti-containing and W-containing diamond-like carbon coatings

Meng, W. J.; Gillispie, Bryan A.

doi:10.1063/1.368650

Cited by 130 publications

(43 citation statements)

References 12 publications

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“…By controlling the size and volume fraction of nanocrystalline phases in an amorphous matrix and consequently the separation width of amorphous matrix among the nanocrystallites, the properties of the nanocomposite coatings can be tailored, e.g., to make a balance between hardness and elastic modulus to permit close match to the elastic modulus of substrates [1], and particularly to obtain high toughness that is crucial for applications under high loading contact and surface fatigue [2]. In addition to these characteristics, amorphous carbon (a-C) based nanocomposite coatings exhibit not only excellent wear resistance but also low friction due to self-lubrication effects, which make them environmentally attractive because lubricants can be omitted.…”

Section: Introductionmentioning

confidence: 99%

Nanostructured TiC/a-C coatings for low friction and wear resistant applications

Pei

Galvan

Hosson

et al. 2005

Surface and Coatings Technology

115

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Closed-field unbalanced and balanced magnetron sputtering was used to deposit nanocrystalline TiC (nc-TiC)/amorphous carbon (a-C) nanocomposite coatings with hydrogenated or hydrogen-free a-C matrix, respectively. The contents of Ti and C in the coatings have been varied over the full range of interest (7-45 at.% Ti) by changing the flow rate of acetylene gas or the locations of substrates relative to the center of C/TiC targets. Different levels of bias and deposition pressure were used to control the nanostructure. The nanocomposite coatings exhibit hardness of 5-35 GPa, hardness/E-modulus ratio up to 0.15, wear rate of 4.8Â10 À17 m 3 /N m lap, friction coefficient of 0.04 under dry sliding and strong self-lubrication effects. The nanostructure and elemental distribution in the coatings have been characterized with cross-sectional and planar high-resolution transmission electron microscopy (HRTEM) and energy-filtered TEM. The influence of the volume fraction and size distribution of nc-TiC on the coating properties has been examined. D

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Section: Introductionmentioning

confidence: 99%

Nanostructured TiC/a-C coatings for low friction and wear resistant applications

Pei

Galvan

Hosson

et al. 2005

Surface and Coatings Technology

115

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“…Doping of (hydrogenated) amorphous carbon films with transition metals (a-C:Me, a-C:H:Me) is a way to improve their properties in respect to hardness, wear resistance, stress and electrical conductivity [1][2][3][4][5][6] . In nuclear fusion research, a-C:Me films are used as a model material to study the influence of metal-doping on the reactivity of carbon against hydrogen species (chemical sputtering) [7][8][9] .…”

Section: Introductionmentioning

confidence: 99%

Influence of doping (Ti, V, Zr, W) and annealing on the sp2 carbon structure of amorphous carbon films

Adelhelm

Balden

Rinke

et al. 2009

Journal of Applied Physics

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The influence of the transition metal (Ti, V, Zr, W) doping on the carbon matrix nanostructuring during the thin film growth and subsequent annealing is investigated. Pure and metal-doped amorphous carbon films (a-C, a-C:Me) were deposited at room temperature by non-reactive magnetron sputtering. The carbon structure of as-deposited and post-annealed (up to 1300 K) samples was analyzed by X-ray diffraction (XRD) and Raman spectroscopy.The existence of graphene-like regions in a-C is concluded from a (10) diffraction peak. A comparison of the XRD and Raman results suggests that XRD probes only the small amount of 2-3 nm large graphene-like regions, whereas the majority of the sp 2 phase is present in smaller distorted aromatic clusters which are probed only by Raman spectroscopy. Annealing leads to an increase of the graphene size and the aromatic cluster size. During the carbon film growth the addition of metals enhances ordering of sp 2 carbon in sixfold aromatic clusters compared to a-C, Ti and Zr showing the strongest effect, W the lowest. This order qualitatively corresponds with the catalytic activity of the respective carbides found during graphitization of carbide-doped graphites published in the literature. With annealing, carbide crystallite formation and growth occurs in a-C:Me films, which destroys the initial carbon structure, reduces the size of the initially formed aromatic clusters and the differences in carbon structure introduced by different dopants. For high annealing temperatures the carbon structure of a-C:Me films is similar to that of a-C, and is determined only by the annealing temperature.2

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“…As we know that the I D /I G ratio increases due to defect of graphitic lattice into the films, that means sp 2 phase will increase into the films which indicates the phase transformation of disordered diamond-like structure to ordered single crystal graphitic structure. [39][40][41] The intensity ratio decreases (1.62→0.76) continuously from 27.8 μl/min to 80.6 μl/min and its increases (0.76→2.15) continuously from 80.6 μl/min to 149.5 μl/min. The (I D /I G ) becomes minimum (0.76) at 80.6 μl/min flow rate.…”

Section: B Structural Propertiesmentioning

confidence: 99%

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

et al. 2012

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Diamond-like nanocomposite (DLN) thin films were deposited on pyrex glass substrate using different flow rate of haxamethyldisiloxane (HMDSO) based liquid precursor with nitrogen gas as a glow discharged decomposition by plasma enhanced chemical vapor deposition (PECVD) technique. The significant influence of different precursor flow rates on refractive index and thickness of the DLN films was measured by using spectroscopic filmatrics and DEKTAK profilometer. Optical transparency of the DLN thin films was analyzed by UV-VIS-NIR spectrometer. FTIR spectroscopy, provides the information about shifted bonds like SiC2, Si-C, Si-O, C-C, Si-H, C-H, N-H, and O-H with different precursor flow rate. We have estimated the hardness of the DLN films from Raman spectroscopy using Gaussian deconvolution method and tried to investigate the correlation between hardness, refractive index and thickness of the films with different precursor flow rates. The composition and surface morphology of the DLN films were investigated by X-ray photo electron spectroscopy (XPS) and atomic force microscopy (AFM) respectively. We have analyzed the hardness by intensity ratio (ID/IG) of D and G peaks and correlates with hardness measurement by nanoindentation test where hardness increases from 27.8 μl/min to 80.6μl/min and then decreases with increase of flow rate from 80.6μl/min to 149.5μl/min. Finally, we correlates different parameters of structural, optical and tribological properties like film-thickness, refractive index, light transmission, hardness, surface roughness, modulus of elasticity, contact angle etc. with different precursor flow rates of DLN films

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Mechanical properties of Ti-containing and W-containing diamond-like carbon coatings

Cited by 130 publications

References 12 publications

Nanostructured TiC/a-C coatings for low friction and wear resistant applications

Nanostructured TiC/a-C coatings for low friction and wear resistant applications

Influence of doping (Ti, V, Zr, W) and annealing on the sp2 carbon structure of amorphous carbon films

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

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