2005
DOI: 10.1016/j.surfcoat.2004.10.106
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Nanostructured TiC/a-C coatings for low friction and wear resistant applications

Abstract: Closed-field unbalanced and balanced magnetron sputtering was used to deposit nanocrystalline TiC (nc-TiC)/amorphous carbon (a-C) nanocomposite coatings with hydrogenated or hydrogen-free a-C matrix, respectively. The contents of Ti and C in the coatings have been varied over the full range of interest (7-45 at.% Ti) by changing the flow rate of acetylene gas or the locations of substrates relative to the center of C/TiC targets. Different levels of bias and deposition pressure were used to control the nanostr… Show more

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Cited by 115 publications
(65 citation statements)
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“…Typically, the group IV metals Ti, Zr, and Hf form crystalline films although the carbide often is present as nano-sized crystallites in an amorphous carbon (a-C) matrix, depending of the C content. The properties of these nanocomposites are typically affected by the relative amount of a hard carbide phase in a softer a-C matrix [4][5][6][7]. For the 3d transition metals, the tendency to form amorphous films increases with increasing number of d-electrons in the metal and sputtered Cr-C and Fe-C films are therefore often amorphous [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Typically, the group IV metals Ti, Zr, and Hf form crystalline films although the carbide often is present as nano-sized crystallites in an amorphous carbon (a-C) matrix, depending of the C content. The properties of these nanocomposites are typically affected by the relative amount of a hard carbide phase in a softer a-C matrix [4][5][6][7]. For the 3d transition metals, the tendency to form amorphous films increases with increasing number of d-electrons in the metal and sputtered Cr-C and Fe-C films are therefore often amorphous [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4], and the possibility to develop self-adaptive coatings for tribological applications [5].…”
Section: Introductionmentioning
confidence: 99%
“…As well, AFM images are also obtained at the micrometer level, only showing the surface morphologies of indentation impressions. [15][16][17][18][19][20][21][22][23][24][25] Comparing with optical and AFM images, SEM images have a better resolution of indentation impressions. However, little data has focused on the atomic-scale microstructure underneath the indenter, although the cross-section and surface morphologies with columnar or nanocrystalline structures have been broadly reported.…”
Section: Introductionmentioning
confidence: 99%