2007
DOI: 10.1016/j.tsf.2007.01.058
|View full text |Cite
|
Sign up to set email alerts
|

Mechanical properties of polymer thin film measured by the bulge test

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

5
30
0

Year Published

2009
2009
2024
2024

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 67 publications
(35 citation statements)
references
References 12 publications
5
30
0
Order By: Relevance
“…Destructive techniques generally involve design of test apparatus or applying load to execute the measurement on thin films, such as tensile test [2][3][4][5], bulge test [6][7][8], bending test [9] and nanoindentation [10,11]. Among those techniques, nanoindentation is the most popular one that can simultaneously determine both hardness and elastic constant of a thin film.…”
Section: Introductionmentioning
confidence: 99%
“…Destructive techniques generally involve design of test apparatus or applying load to execute the measurement on thin films, such as tensile test [2][3][4][5], bulge test [6][7][8], bending test [9] and nanoindentation [10,11]. Among those techniques, nanoindentation is the most popular one that can simultaneously determine both hardness and elastic constant of a thin film.…”
Section: Introductionmentioning
confidence: 99%
“…(17), in which c is the undetermined integral constant. Thus the general solution (satisfies the boundary condition (14a)) of Eq.…”
Section: The Membrane Equation and The Solutionmentioning
confidence: 99%
“…A variety of techniques have been employed to measure the elastic constants of thin films, for example, tensile test [7][8][9], substrate curvature technique [10][11][12][13], bulge test [14][15][16][17], microbeam bending or deflection technique [18,19], nanoindentation (NIP) [20][21][22][23][24][25][26][27], resonant ultrasound spectroscopy [28][29][30], surface guided wave technique [31][32][33], X-ray diffraction (XRD) technique [34,35], combination of 2 sin ψ X-ray diffraction and laser curvature methods [36,37], combination of acoustic microscopy and nanoindentation method [38,39]. Among the above-mentioned methods, it is available in a few cases that the methods are able to simultaneously determine the Poisson's ratio and Young's modulus of elasticity for functional thin films and thin film structures, but usually either Poisson's ratio or modulus of elasticity should be assumed a priori for determining the other one.…”
Section: Introductionmentioning
confidence: 99%
“…Imaging was performed with Veeco Innova Scanning Probe Microscope operating in tapping mode, with oxide-sharpened silicon probes (RTESPA-CP) at resonant frequency of ≈300 kHz. The mechanical properties of the single layer nanofilms were evaluated by a bulging test, described in details in the literature (Huang et al 2007). The experimental setup for the measurement of the elastic modulus is shown in Fig.…”
Section: Fabrication and Characterization Of Pla Nanofilmsmentioning
confidence: 99%