Mechanical properties of hard carbon films

Weißmantel, C.; Schürer, Christian; Fröhlich, F.; Grau, P.; Lehmann, Henry

doi:10.1016/0040-6090(79)90452-8

Cited by 68 publications

(8 citation statements)

References 6 publications

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“…Furthermore, the amorphous substrate cannot be expected to .play any role in constraining the propagation direction. The parallel sinusoidal buckling on a glass substrate observed by both Weissmantel and co-workers [7,8] and Nir [9] cannot be observed in the present work. As for the parallel buckling waves, the presence .of anisotropic internal stress might be the reason, as Nir points out [9].…”

Section: Resultscontrasting

confidence: 53%

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Stress relief behaviour of diamond-like carbon films on glasses

Lee

Baik

Eun

1993

Diamond and Related Materials

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The stress relief behaviour of diamond-like carbon (DLC) films on glass substrates was investigated. The r.f.-plasma-enhanced chemical vapour deposition method was used for the deposition with variable negative bias voltages of the cathode from -100 to -700 V. Beyond a critical thickness of the film, film delamination starts to occur after its removal from the reaction chamber. In addition to the previously observed stress relief morphologies, sinusoidal cracking and sinusoidal removal of the film are also observed. The stress relief morphology is dependent on the film thickness and the negative bias voltage. The measured wavelength of sinusoidal buckling increases with both increasing film thickness and increasing negative bias voltage. This behaviour is qualitatively consistent with a phenomenological equation derived by Nir. It was suggested that the elastic modulus of the DLC film can be calculated using the dependence of the wavelength of sinusoidal buckling on the film thickness and the negative bias voltage.

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Section: Resultscontrasting

confidence: 53%

“…In 1979 Weissmantel and co-workers [7,8] first reported sinusoidal stress relief patterns of DLC films on glass and NaC1 substrates. Their study was, however, limited to the observation itself.…”

Section: Introductionmentioning

confidence: 99%

Stress relief behaviour of diamond-like carbon films on glasses

Lee

Baik

Eun

1993

Diamond and Related Materials

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“…3, all the films have internal compressive stresses that reach a maximum at VH2 = 10%. These 'kinds of compressive stress have been observed in the carbon films prepared by other preparation methods such as evaporation and arcing (25)- (27). The in-H, content in sputtering gas, V, , (%) ternal stresses observed might be intrinsic stresses caused by impurities and incomplete structural ordering in the films ( I ) .…”

Section: Results and Dlscussionmentioning

confidence: 96%

Friction, Wear, and Triboelectron Emission of Hydrogenated Amorphous Carbon Films

Nakayama

Yamanaka

Ikeda

et al. 1997

Tribology Transactions

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Amwphow and hydrogenated amolphous carbon films were prepared on a g h s substrate using DC magnetron sputtering deposition in gas mixtures of H2 and Ar having different H2 content. T n b~ emission and fiction were measured in a fictional system by sliding an AeOs ball across carbon films in a dry air atmosphere. Wear behavior of the carbon films was investigated by observing t h worn sufaces with a scanning electron microscope (EM) and an atomic force microscope (AFM). Carbon films prepared with low level H2 gas contents showed low fiction and low wear in the production of low electron missions. With i n t m d i a t e level H2 gas contents, transitions of fiction, wear intensity and electron emissions occurred from low to high. At high H2 gas content, high fiction and high wear occurred to produce high electron emissions. These wear mechanisms and the tnbomission behavior are discussed in relation to the sujace energy and internal compressive stress of the carbon film.

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“…Excessive residual stresses in thin films can result in severe problems for the above mentioned applications. For instance, compressive residual stresses may induce adhesion failure between film and substrate giving rise to buckling phenomenon above a critical film thickness [3]. That is the case for films prepared using sputtering techniques for which the film thickness is a limiting factor for future applications.…”

Section: Introductionmentioning

confidence: 99%