Mechanical Performances of an Integrate Micropump. Application in Electrophoresys

Ravariu, F.; Ravariu, Cristian; Nedelcu, Oana; Babarada, F.; Manea, E.; Podaru, C.

doi:10.1109/smicnd.2006.283966

Cited by 2 publications

(4 citation statements)

References 2 publications

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“…The previous figures prove that neither harmonics don't damage the membrane: the maximum displacement is 2.4m, still far away from the failure conditions. V. MICROFLUIDICS SIMULATION For the micro-fluidics domain the software can simulate isolate or complex fluids ducts, [10]. A diffuser is an expanding duct and a nozzle is a converging duct.…”

Section: A Modal Analysismentioning

confidence: 99%

Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

Ravariu

Babarada

2011

Int. J. Onl. Eng.

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Abstract-The MEMS structures represent a milestone in the actual bioengineering and micro-fluidics area. Simulators are necessary for the students training or for specialists at the design stage. This paper presents some tools and their applications for the simulation of an integrated micropump, achievable in the SOI technology. The simulations results intend to emphasize the tools performances and functions with example on the proposed SOI-MEMS structure. Furthermore, the paper is focused on the software facilities and possible lab them as a contribution to the learning technologies.

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Section: A Modal Analysismentioning

confidence: 99%

Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

Ravariu

Babarada

2011

Int. J. Onl. Eng.

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“…The channel conductivity is changing, as a result of the additional ions produced at the gate electrode surface. For the enzyme entrapping in the ENFET gate space, a novel technique was previously presented, using an Al 2 O 3 nanoporous film, which acts as an adsorbing layer for the enzyme, [6,7].…”

Section: The Global Enfet Principle Simulationmentioning

confidence: 99%

“…The Al 2 O 3 material can be defined in ATLAS as a general insulator, specifying its model parameters (e.g. ε r =8.2, [7]).…”

Section: The Global Enfet Principle Simulationmentioning

confidence: 99%

“…The insulator material was selected as ambient with the Al 2 O 3 properties and 150nm thickness. This ENFET architecture was simulated applying an electrical stimulus on Gate, accordingly with a calibration curve Potential Electrode-Analyte concentration provided by the state of the art of electrochemistry, [7]. Fig.…”

Section: Proceedings Of the Iasted International Conferencementioning

confidence: 99%

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The Electrodes Geometry Design and Global Simulations for an Enfet Gluco-Detector

Ravariu

Babarada

Manea

et al. 2010

Biomedical Engineering

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The ENFET biodevice integrates on the same chip a field effect transistor as transducer and an enzymatic receptor within a biosensor. This paper presents the global simulations of a MOSFET transistor working as a glucose detector, besides to the computer aided design for the electrodes geometry definition. The values of the simulated parameters prescribe the fabrication process, doping and sizes. A particular experiment for the reference electrode TiAg/AgCl manufacturing is presenting as an original item. Using dedicated software tools, the layers that constitute the fabrication masks for the final ENFET are established, as another novelty of this paper.

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Mechanical Performances of an Integrate Micropump. Application in Electrophoresys

Cited by 2 publications

References 2 publications

Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

The Electrodes Geometry Design and Global Simulations for an Enfet Gluco-Detector

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