Mechanical effects of polishing pad in copper electrochemical mechanical deposition for planarization

Jeong, Sukhoon; Lee, Sangjik; Park, Boumyoung; Kim, Hyoungjae; Kim, Sungryul; Jeong, Haedo

doi:10.1016/j.cap.2009.06.011

Cited by 12 publications

(7 citation statements)

References 30 publications

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“…Thus, the nature of polishing cloth or pads may affect the contacting surfaces according to some research studies. [12][13][14] Iron powder and WA abrasive combination Initial roughness between 0.2 and 0.8 μm R a influenced the results of this experiment. In future applications with this method, it is believed that certain conditions such as current density or electrolyte type and concentration could be modified depending on the initial tube roughness to achieve the targeted value.…”

Section: Resultsmentioning

confidence: 84%

Investigation of the finishing characteristics in an internal tube finishing process by magnetic abrasive finishing combined with electrolysis

Muhamad

Zou

Sugiyama

2016

Transactions of the IMF

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In this research, the finishing characteristics in a tube's internal finishing process using the method of magnetic abrasive finishing (MAF) combined with electrolysis has been studied. Electrolysis produces an aluminium oxide film that accelerates the removal of the initial hairline morphology on the surface. Subsequently, the film is removed with MAF. This process significantly minimises the surface roughness in a reduced time. The way the finishing conditions, such as the polepipe gap, iron particle size and abrasiveness combinations, and processing time affected the surface morphology in the MAF machining process has been particularly examined. The surface roughness was measured and images of the finished surfaces were recorded to study the morphology changes. Prolonged electrolysis finishing was seen to deepen the oxidation film and pits, which adversely affects the surface. This evidence suggests that the pit residuals contribute to higher surface roughness values.

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Section: Resultsmentioning

confidence: 84%

Investigation of the finishing characteristics in an internal tube finishing process by magnetic abrasive finishing combined with electrolysis

Muhamad

Zou

Sugiyama

2016

Transactions of the IMF

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“…The polishing process are mainly applied in precision machinery [6], electronic equipment [7], instrumentation [8], medical equipment and household appliances, kitchen utensils, etc. The polishing quality greatly affects the quality of the product, and selection of the appropriate polishing process and the method is quite important to improve the quality of the products.…”

Section: Introductionmentioning

confidence: 99%

Polishing Path Planning of Complex Curved Surfaces and the Realization of Automatic Control

Zhang¹,

Zheng²

2016

IJSH

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Polishing technology is a final surface finishing process. The main aim is the removal of the machining marks to make the surface bright and clean. Polishing is often difficult to realize automatic mechanical polishing due to the polishing quality requirements and workpiece shape. Aiming at the problem, an automatic polishing technology has been proposed. In the paper, a new polishing path determining a method has been proposed. With this path, the abrasive properties have been studied. Firstly, the abrasive has been selected according to the surface roughness experiment; then, the detailed parameters of processing have been researched. The experimental results show that there is a reasonable grain size meeting the roughness requirement of the workpiece surface with relatively larger abrasive grain size. Besides, it can also be concluded that the roughness of the workpiece surface and the path planning of the abrasive and the processing parameters have high relationship, and only the full consideration of all the parameters can help to improve the processing efficiency with the low cost.

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“…Based on kinematics, when the polishing tools obtain a rotational speed, the relative speed would be changed because the relative speed is the resultant speed of the rotational speed of workpiece and the rotational speed of polishing tool. 13,14 If the polishing tool rotates faster, it would play the dominant role especially in the center of workpiece where the rotating radius is small. But this is totally not the case on the edge of the workpiece.…”

Section: Introductionmentioning

confidence: 99%

“…13,14 If the polishing tool rotates faster, it would play the dominant role especially in the center of workpiece where the rotating radius is small. But this is totally not the case on the edge of the workpiece.…”

Section: Introductionmentioning

confidence: 99%

Study on the influence of the rotational speed of polishing disk on material removal in aspheric surface compliant polishing

Zhan

Zheng

2015

Advances in Mechanical Engineering

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When a soft polishing tool is compressed on a stiff workpiece of curved surface, the contact area is a piece of the curved surface. In the process of aspheric surface polishing, the machining speed is always provided by the rotational speed of the spindle of a computer numerical control lathe. Yet, the polishing tool is usually made rotating to remove cutting scraps and broken abrasives from the contact area. The rotational speed of the polishing tool would change the distribution state of the relative speed in the whole contact area, and it would definitely change the volume of material removal in the surface of the workpiece. This article studies how the rotational speed of the polishing tool changes the distribution state of the relative speed in the whole contact area and material removal in the volume of the surface of the workpiece. The computing results show that the volume of material removal increases with the increase in both the rotational speed of polishing disk and the rotational speed of lathe spindle, but the polishing quality is totally not in this case.

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Mechanical effects of polishing pad in copper electrochemical mechanical deposition for planarization

Cited by 12 publications

References 30 publications

Investigation of the finishing characteristics in an internal tube finishing process by magnetic abrasive finishing combined with electrolysis

Investigation of the finishing characteristics in an internal tube finishing process by magnetic abrasive finishing combined with electrolysis

Polishing Path Planning of Complex Curved Surfaces and the Realization of Automatic Control

Study on the influence of the rotational speed of polishing disk on material removal in aspheric surface compliant polishing

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