2012
DOI: 10.1007/s12206-011-1214-1
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Mechanical characterization of materials at small length scales

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Cited by 79 publications
(32 citation statements)
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“…[330][331][332][333][334]. The first key element when testing freestanding thin films or nanowires is the extraction, manipulation and positioning of the specimens.…”
Section: Fracture Testing Methods Of Freestanding Specimensmentioning
confidence: 99%
“…[330][331][332][333][334]. The first key element when testing freestanding thin films or nanowires is the extraction, manipulation and positioning of the specimens.…”
Section: Fracture Testing Methods Of Freestanding Specimensmentioning
confidence: 99%
“…If polysilicon is considered as structural material, an amplifier with a pair of 250 µm long, 6 µm wide, and 22 µm thick beams 1 , with inclination angle θ=2° fulfills both requirements. In fact, according to the last of expressions (10), kA=289 N/m, while according to equation (14), such geometry allows to achieve an amplification ratio (without any sample) v2/u1=19.44. In particular, it is interesting to note that with this amplification ratio, it is possible to achieve a sample displacement bigger than 1µm (one of the design constraints) with a small actuator displacement (~60 nm), and thus a small temperature increase (~20°C from figure 2b), while being able to apply forces bigger than 200 µN.…”
Section: Design Of the Mechanical Amplifiermentioning
confidence: 99%
“…Among these, the most promising techniques are based on Micro-ElectroMechanical Systems (MEMS) technology. The most important advantage they offer relies on the compatibility of MEMS devices with Scanning/Transmission Electron Microscope (SEM/TEM) chambers, which enable for real-time imaging of the sample deformation, while providing high displacement and force resolution [10].…”
Section: Introductionmentioning
confidence: 99%
“…Young's modulus size effect is of interest because it is an essential input for finite element method (FEM) modelling [1]. Focused ion beam (FIB) has the ability to machine a range of geometries for testing bulk mechanical properties along specific crystallographic orientations, or properties of interesting regions such as grain boundaries [2], [3].…”
Section: Introductionmentioning
confidence: 99%