2011
DOI: 10.1016/j.tsf.2011.07.068
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Mechanical characterization of LiPON films using nanoindentation

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Cited by 129 publications
(84 citation statements)
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“…Experimental values of S 2 / P max measured in this work with three‐sided pyramidal indenters having centerline‐to‐face angles of 35.3°, 55°, 65.3°, and 75° were used for calibrating the finite element data with equivalent conical indenter centerline‐to‐face angles of 42.2°, 61.4°, 70.3°, and 78.2°, respectively. S 2 / P max is a parameter unique to the combination of indenter geometry and material that is a constant with applied load or indentation depth for bulk, homogeneous materials with no indentation size effect . Experimental values of S 2 / P max with an error of ±10 GPa for fused silica were found to be 571 GPa, 600 GPa, 607 GPa, and 938 GPa for the 35.3°, 55°, 65.3° and 75° pyramidal indenters, respectively.…”
Section: Methodsmentioning
confidence: 99%
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“…Experimental values of S 2 / P max measured in this work with three‐sided pyramidal indenters having centerline‐to‐face angles of 35.3°, 55°, 65.3°, and 75° were used for calibrating the finite element data with equivalent conical indenter centerline‐to‐face angles of 42.2°, 61.4°, 70.3°, and 78.2°, respectively. S 2 / P max is a parameter unique to the combination of indenter geometry and material that is a constant with applied load or indentation depth for bulk, homogeneous materials with no indentation size effect . Experimental values of S 2 / P max with an error of ±10 GPa for fused silica were found to be 571 GPa, 600 GPa, 607 GPa, and 938 GPa for the 35.3°, 55°, 65.3° and 75° pyramidal indenters, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…S 2 /P max is a parameter unique to the combination of indenter geometry and material that is a constant with applied load or indentation depth for bulk, homogeneous materials with no indentation size effect. 27 Experimental values of S 2 /P max with an error of AE10 GPa for fused silica were found to be 571 GPa, 28 600 GPa, 607 GPa, and 938 GPa for the 35.3°, 55°, 65.3°and 75°pyramidal indenters, respectively.…”
Section: Constitutive Parameters and Finite Element Inputsmentioning
confidence: 94%
See 1 more Smart Citation
“…They are also mechanically strong: nanoindentation measurements of lithium phosphonate oxide (LiPON) demonstrate elastic modulus of 77 GPa, (Herbert et al 2011), which is well beyond the minimum value of 3.4 GPa predicted by Newman (Monroe and Newman 2009) that is required of an electrolyte to suppress metallic lithium dendrite formation. Despite their mechanical strength, many ceramic electrolytes demonstrate excellent room-temperature ionic conductivity ([10 -3 S/cm) with lithium transference *1.…”
Section: Ceramic Electrolytesmentioning
confidence: 83%
“…The use of solid‐state ion conductors as separators in ion battery chemistries is advantageous under consideration of safety and packaging requirements . For example, in lithium ion batteries solid inorganic ion conductors can be inherently more robust against dendrite formation, which can pierce polymer membranes leading to short circuits and potential for combustion of liquid electrolytes. Existing solid‐state thin film battery technologies rely primarily on configurations with lithium phosphorus oxynitride (LiPON) ion conductors.…”
Section: Introductionmentioning
confidence: 99%