Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition

Igaki, Jun‐ya; Nakamatsu, Ken−ichiro; Kometani, Reo; Kanda, Kazuhiro; Haruyama, Yuichi; Kaito, Takashi; Matsui, Shinji

doi:10.1116/1.2357960

Cited by 32 publications

(27 citation statements)

References 5 publications

(2 reference statements)

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“…We assumed a density of 3800 kg/m 3 , a value determined experimentally in a previous study. 23 To determine the Young's modulus, we conducted least-square fitting of the measured resonant frequencies of the cantilevers. The fitting yielded a Young's modulus of 170 GPa, which is consistent with the value measured in the referenced study (187 6 32 GPa).…”

Section: B Vibration Characteristics Evaluationmentioning

confidence: 99%

Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition

Ashiba

Kometani

Warisawa

et al. 2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Section: B Vibration Characteristics Evaluationmentioning

confidence: 99%

Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition

Ashiba

Kometani

Warisawa

et al. 2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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“…Specimen mass was much less than cantilever mass, so change during dissolution, Δm, could be derived from the resonance frequency difference (14,15):…”

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confidence: 99%

Tracking single coccolith dissolution with picogram resolution and implications for CO ₂ sequestration and ocean acidification

Hassenkam

Johnsson

Bechgaard

et al. 2011

Proc. Natl. Acad. Sci. U.S.A.

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Coccoliths are micrometer scale shields made from 20 to 60 individual calcite (CaCO 3 ) crystals that are produced by some species of algae. Currently, coccoliths serve as an important sink in the global carbon cycle, but decreasing ocean pH challenges their stability. Chalk deposits, the fossil remains of ancient algae, have remained remarkably unchanged by diagenesis, the process that converts sediment to rock. Even after 60 million years, the fossil coccolith crystals are still tiny (<1 μm), compared with inorganically produced calcite, where one day old crystals can be 10 times larger, which raises the question if the biogenic nature of coccolith calcite gives it different properties than inorganic calcite? And if so, can these properties protect coccoliths in CO 2 challenged oceans? Here we describe a new method for tracking dissolution of individual specimens, at picogram (10 −12 g) resolution. The results show that the behavior of modern and fossil coccoliths is similar and both are more stable than inorganic calcite. Organic material associated with the biogenic calcite provides the explanation. However, ancient and modern coccoliths, that resist dissolution in Ca-free artificial seawater at pH > 8, all dissolve when pH is 7.8 or lower. Ocean pH is predicted to fall below 7.8 by the year 2100, in response to rising CO 2 levels. Our results imply that at these conditions the advantages offered by the biogenic nature of calcite will disappear putting coccoliths on algae and in the calcareous bottom sediments at risk. marine carbon cycle | ocean buffer capacity | dissolution rate | atomic force microscopy | single particle dissolution

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“…21 Young's modulus was 187 GPa, and the density of the DLC deposited via FIB-CVD was 3.8 Â 10 3 kg/m 3 . 22 The hardness of DLC is sufficient for it to be used as a master mold. (2) A fluorinated self-assembled monolayer (F-SAM) was formed on the mold surface to promote the detachment of the PDMS.…”

Section: Methodsmentioning

confidence: 99%

Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

Kang

Nakai

Haruyama

et al. 2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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The authors report density measurements of a pillar structure that was fabricated via nanoimprinting using a poly(dimethylsiloxane) mold. The imprinted pillars were fabricated using two types of resin, SU-8 and hydrogen silsesquioxane, and were characterized by measuring the spring constant using a scanning probe microscopy cantilever, which was manipulated with a three-axis actuator. The spring constant determined Young's modulus of the imprinted pillars. The authors measured the resonant frequency using the alternating current electrostatic force. Using the results for Young's modulus and the resonant frequency, they determined the density of the pillar structure fabricated via nanoimprinting.

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Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition

Cited by 32 publications

References 5 publications

Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition

Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition

Tracking single coccolith dissolution with picogram resolution and implications for CO ₂ sequestration and ocean acidification

Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

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Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition

Cited by 32 publications

References 5 publications

Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition

Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition

Tracking single coccolith dissolution with picogram resolution and implications for CO 2 sequestration and ocean acidification

Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

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Product

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Tracking single coccolith dissolution with picogram resolution and implications for CO ₂ sequestration and ocean acidification